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JINAN JINGZHENG ELECTRONICS CO,. LTD

China

The fabrication technology of the lithium niobate (LiNbO3, LN) thin film is briefly described in the figures below, which is based on ion implantation and wafer bonding. A lithium niobate wafer is implanted with H or He ions, and the implanted depth is decided by the ion energy. With another lithium niobate wafer a SiO2 layer is deposited. Then the implanted wafer is cleaned and bonded to the deposited wafer. After bonding, the wafers are thermal treated. During the thermal treatment process, the layer is split-off from the donor wafer as a single-crystal film. A further annealing step is used to strengthen the bonding, finally a chemical mechanical polishing (CMP) process is used to smooth the surface. In this way, high-quality single-crystal lithium niobate thin film with a thickness of several hundred nanometers is produced.

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