3D Optical Profilers

Coherence Scanning Interferometry (CSI)

Description

When specifying a 3D optical metrology solution, it is important to appreciate that not all tools are the same, and users should look for solutions characterized by their speed, superior measurement precision, magnification range, and the ability to measure a broad spectrum of surfaces from the super-smooth to the extremely rough. ZYGO's Coherence Scanning Interferometry (CSI) based 3D Optical Profilers deliver best in class performance in all of these categories. These systems use the principle of optical interference to measure a sample. Coherence Scanning Interferometry Diagram:as shown in the image, illumination is divided into two paths where one travels to a precision reference surface, and the other travels to the test surface. The reflections from these two surfaces combine at a camera detector where they interfere with each other, and a pattern of light and dark intensities is created ... Click to read more

  • Optical measuring equipment
  • 3D Optical Profiler instruments
  • Surface measurement
  • Optical profiler systems

Domain icon Manufacturer/ Producer

06455 Middlefield - United States

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