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3D Optical Profilers

Metrology Software - Mx™ for 3D Optical Profilers


ZYGO's Mx™ software powers complete system control & data analysis, including interactive 3D maps, quantitative topography data, intuitive navigation, & built-in SPC with statistics, control charting, and pass/fail limits. World Class Analysis & Control Software Mx is the successor to the highly trusted MetroPro measurement and analysis suite. Mx continues the legacy of trustworthy metrology, powerful customization, and production friendly automation. Its workflow-based design guides users through the metrology experience from setup through analysis and reporting. Interactive plots show full-area data in 2D or 3D, along with profile slices, material ratio, slope analysis, and PSD views. Production quality analysis is made simple with built-in SPC, pass/fail indication, data reporting and run charts. Click to read more