Alignment Module Am

Alignment Table AT is a rotary positioning mechanism capable of precise angle correction, in which a high rigidity steel table and bed are used and IKO Crossed Roller Bearings are incorporated in the bearings supporting the table. Alignment Table AT uses the ball screw drive to convert linear motion into circular motion in a fixed angle range and positions the table in the rotational direction. An IKO Linear Way L is used for the linear motion rolling guide of the ball screw drive mechanism, combined with a precision ball screw to achieve high precision positioning. Placing Alignment Table AT on the slide table of the IKO Precision Positioning Table enables the configuration of a low height XYθ multiaxis positioning mechanism. This enables the table to be used as an alignment table for precision measuring equipment, inspection equipment and assemblers.

Using IKO CLube Linear Way L for the linear motion rolling guide and IKO Crossed Roller Bearings in the rotation guiding parts, while adopting direct drive method in the drive section, IKO Alignment Stage SA···DE is a compact, lowprofile alignment stage which achieves XYθ motion.Alignment Stage SA···DE achieves highly accurate positioning without backlash by combining a highresolution linear scale and full closed loop control. An ideal positioning mechanism for alignment processing using image processing, such as in semiconductor/liquid crystal manufacturing equipment, or for measuring instruments or testing and inspection equipment requiring clean environments.

IKO Precision Elevating Table TZ is an elevating table that performs precision positioning in the up and down directions by using the wedge mechanism.The wedge mechanism applied IKO Linear Way has achieved both high accuracy and high rigidity with a compact size.

IKO Super Precision Positioning Table TX is a positioning table with extremely high accuracy which is created based on the high precision, high rigidity and well proven IKOPrecision Positioning Table LH by using cylindrical rollers for rolling elements and incorporating IKOLinear Roller Way Super X, which has bestinclass running performance as a linear motion rolling guide, with fullyclosed loop control. Optimal for highly accurate positioning where the existing rolling guides could not be used.