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Circular Magnetrons - Circular Magnetron Sputtering Cathodes


Angstrom Sciences' circular magnetrons have become recognized as the new standard of the sputtering industry, because in addition to the advanced features of the Angstrom Advantage™, they offer a host of other performance advantages as well. Versatile, Compact Design Their compact design makes our circular magnetrons ideal for any new or retrofit application, including the most complex cluster assemblies for the smallest vacuum chambers. Total Power Compatibility Low-impedence heads provide RF, DC, mid-frequency DC, pulsed DC, and microwave power compatibility.Circular Magnetron External Standard Fittings We use ISO NW standard fittings, as well as Conflat® metal seal flanges. All utilities are maintained at atmosphere and accessed through standard O-ring compression fittings for easy installation in any vacuum system. Full Range of Sizes Circular magnetron sources are available from 1" (25mm) through 16"(406mm) inch target diameters.