Deposition and Etch tools

Plasma technology - PlasmaPro 100 PECVD Cluster

Description

Cassette to cassette production tools PlasmaPro 100 Cobra clustered using 7 way robotic handler 200mm & multiwafer batch process modules & tool platforms offering excellent uniformity & high throughput on a range of applications. as stand-alone or cluster systems. Platforms may be clustered to combine technologies and processes with either cassette or single wafer loading options. Hexagonal or square transfer chamber configurations are available. ** Click to request pricing **

  • Scientific research equipment
  • Plasma technology
  • Process Tool Platforms

Domain icon Manufacturer/ Producer

OX13 5QX Abingdon - United Kingdom

Request for quotes

Create one request and get multiple quotes form verified suppliers.

  • Only relevant suppliers
  • Data privacy compliant
  • 100% free