Description

Animated comparison of a PSI measurement with fringe print-through due to vibration, and the same surface measured with QPSI™ technology – free of noisy print-through. Integrated transmission element. The Verifire™ XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, and semiconductor wafers or wafer chucks. This fully integrated system is easy to use, with a heavy duty tip/tilt stage that provides repeatable part placement without the need for custom fixturing. The compact footprint, with built-in vibration isolation, requires minimal production floor space. Vibration Robust The Verifire XL system includes ZYGO's patented QPSI™ acquisition technology which enables reliable high-precision measurements in the presence of vibration. QPSI enables true...

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