INTEGRATED MANAGEMENT OF TOOL RECIPES Increasing complexity of manufacturing and requirements for better process control requires better integration and management. Seamless integration of FDC and Factory Automation and Equipment Control is critical for providing accurate excursion prevention and tight control over the operation of factory equipment. FabGuard™ Recipe Management System helps Semiconductor, Display and Solar manufacturers meet these challenges by providing central archival and management of process equipment recipes. As an add-on to the FabGuard Fault Detection and Classification System, FabGuard FG-RMS expands existing FabGuard systems to include the capabilities required to manage tool process recipes across the factory. CENTRAL MANAGEMENT INCREASES PRODUCTIVITY FabGuard provides central management of tool process recipes using the familiar and robust FabGuard infrastructure. Engineers can view, edit, deploy and manage process recipes from their desktop or...

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