FabGuard® Software

Powerful Yet Compact Solutions for Deployment of FabGuard FabGuard Controllers provide powerful compact solutions for deploying FabGuard integrated process monitoring solutions. These reliable industrial controllers connect with tools and sensors through FabGuard to perform real-time data acquisition and analysis, whether for detailed chamber-specific analysis or as part of a fabwide SPC & FDC system. FabGuard Controllers support INFICON sensors, third-party sensors as well as the variety of tools found throughout fabs. Even the demanding requirements of high-speed applications can be met using the FabGuard High Speed Controller.

Process Characterization Software For The Transpector Gas Analysis System With one-click access to the two most popular RGA functions: monitor and leak check modes, FabGuard Explorer provides you with easy to interpret data showing the most frequently monitored gases (hydrogen, water vapor, nitrogen, oxygen, argon, etc.) in a convenient trend display. FabGuard Explorer is Windows® 8 ready, providing comprehensive RGA software with no concerns about operating system compatibility. The single-sensor version of FabGuard Explorer is a cost-effective solution to operating one Transpector ® RGA. With the software’s multi-sensor version, you can control multiple, different types of Transpector RGAs from a single computer. FabGuard Explorer allows for control of both Transpector MPH and Transpector 2 RGAs from the same software. For connecting multiple Transpector MPH sensors, INFICON offers routers and network switches, while the TCA485 Transpector Communications Adapter is used for...

Tool Management, Process Specific INFICON Sensor Integration and Analysis Systems provide process verification and control, including run-to-run control of key process parameters for process optimization and immediate and automatic feedback to the process equipment or a process engineer on any faults detected and their probable cause. FabGuard Sensor Integration and Analysis System takes data from in situ sensors, integrates that data with data from the process equipment itself, and condenses and analyzes it to provide the process engineer with actionable information. Alternatively, the engineer can choose to have FabGuard automatically send control commands directly to the process equipment. Powerful Data Management for Enhanced Productivity Make your fab's data work for you. The FabGuard Sensor Integration and Analysis System enhances tool productivity, by providing process control, and reducing losses from process drift, contamination, tool malfunction, or unnecessary test...

Timely information is essential for increasing fab productivity and remaining competitive in the market place. The pressure to enhance profitability makes it critical that a factory is productive and flexible, while increasing yield and throughput. FabGuard APC saves both time and money in factory operations by executing run-by-run (RbR) control strategies that drive process results to achieve target regardless of day-to-day equipment or process drift. APC systems collect product measurements and recipe set points which are used to calculate new recipe set points that optimize wafer processing. The use of an APC System maximizes overall product yields and increases profit by making sure that each wafer performs as close to end of line metrics as possible. Benefits FabGuard APC increases yields, reduces costs and enhances manufacturing by providing optimal process set points to compensate for equipment and environmental variations. Strategy and Flow FabGuard APC provides you with...