Description

Timely information is essential for increasing fab productivity and remaining competitive in the market place. The pressure to enhance profitability makes it critical that a factory is productive and flexible, while increasing yield and throughput. FabGuard APC saves both time and money in factory operations by executing run-by-run (RbR) control strategies that drive process results to achieve target regardless of day-to-day equipment or process drift. APC systems collect product measurements and recipe set points which are used to calculate new recipe set points that optimize wafer processing. The use of an APC System maximizes overall product yields and increases profit by making sure that each wafer performs as close to end of line metrics as possible. Benefits FabGuard APC increases yields, reduces costs and enhances manufacturing by providing optimal process set points to compensate for equipment and environmental variations. Strategy and Flow FabGuard APC provides you with...

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