Advanced Modeling, Data Analysis and Visualization Capabilities Made Simple Increase Yield by Expanding Process Data Analysis FabGuard Analysis Server (AS) makes it possible to analyze every variable in the factory to apply advanced multivariate SPC and modeling. Detecting faults caused by the interactions of multiple process variables is accomplished with the many advanced multivariate analysis tools in FabGuard AS. FabGuard Analysis Server can easily expand the capabilities of existing FDC systems by enabling engineers to detect faults not typically monitored by univariate SPC. Many faults are caused by the complex interaction of multiple equipment and process parameters. FabGuard AS provides multiple advanced techniques to perform Fault Detection, Fault Classification and Metrology Prediction. These tools highlight excursions that simple univariate FDC systems will never detect. FabGuard AS provides engineers a powerful toolbox to uncover hard to detect faults.
Germany
Powerful Yet Compact Solutions for Deployment of FabGuard FabGuard Controllers provide powerful compact solutions for deploying FabGuard integrated process monitoring solutions. These reliable industrial controllers connect with tools and sensors through FabGuard to perform real-time data acquisition and analysis, whether for detailed chamber-specific analysis or as part of a fabwide SPC & FDC system. FabGuard Controllers support INFICON sensors, third-party sensors as well as the variety of tools found throughout fabs. Even the demanding requirements of high-speed applications can be met using the FabGuard High Speed Controller.
Request for a quoteCreate one request and get multiple quotes form verified suppliers.