Flow sensor based on silicon technology - SFS01

The IST AG SFS01 EvaKit offers an easy evaluation of the SFS01 gas flow sensor. It has both analog and digital output (I2C) and allows a fast and flexible evaluation of the SFS01 sensor. The I2C output includes both raw values and calibrated flow values from 0 to +-200 sccm. Further advantages of the SFS01 EvaKit include: — Excellent measuring dynamics — Analog output of raw signal — Digital output with raw signal and fully calibrated signal — Integrated flow channel with pneumatic connections

The IST AG FS7 thermal mass flow sensors are the successors of the FS5 flow sensors and exhibit a symmetrical heater design and enhanced sensitivity. The FS7 flow sensor is applicable in gas and offer excellent long-term stability. The small thermal mass of the FS7 sensor provides a fast response time. Additionally, the standard FS7 sensor is also available with a housing which is easily implemented into various applications. Further advantages of the FS7 thermal mass flow sensor include: — Easy adaptation in various applications and housings — Excellent long-term stability — Simple signal processing — Simple calibration — Stable platinum technology — Excellent reproducibility — Customer-specific sensor available upon request. The IST AG FS7 flow sensors are optimal for measuring gas flow in various flow applications.

The IST AG FS2 flow sensors are applicable in gas and offer excellent long-term stability. In addition to measuring flow rates, the FS2 gas flow sensor is able to detect flow direction with outstanding sensitivity. Further advantages of the FS2 thermal mass flow sensor include: — Simple signal processing — Simple calibration — Bare sensor resists up to +450 °C (customer specific) — Stable platinum technology — Excellent reproducibility — No moving mechanical parts — Customer-specific sensor available upon request The IST AG FS2 flow sensors are optimal for measuring gas flow and direction.

The IST AG MicroFlowSens (MFS) technology was developed for fast flow measurements. Due to the membrane system, the thermal mass is reduced to the minimum resulting in a very fast response time and low power consumption. In addition to measuring flow rates, the MicroFlowSens offers an outstanding sensitivity and is able to detect flow direction. The MFS flow sensor is optimal for limited space system integration and is available as integrated sensor on a PCB. Further advantages of the MFS thermal mass flow sensor include: — Excellent solution for applications with high flow rates and fast response time in CTA mode — Very high measuring dynamic with CTA mode (10'000'000 : 1) without bypass — Excellent for the measurement of very low flow rates and leakage detection with bridge mode — High chemical resistance against aggressive gases and vapors — Different sensitivities, circuit topologies available — Detection of flow direction — Customer-specific sensor layout upon request