High Precision Vacuum Gauges

1000 ... 500 Torr / mbar
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Description

INFICON SKY CDG160D high temperature manometers are your best choice for accurate total pressure measurement and control. CDG160D gauges are temperature controlled at 160 °C for superior performance in demanding semiconductor and plasma processes. They are available for full scale ranges from 1 Torr to 1000 Torr, with all common flange types and fieldbus interfaces and provide a linear 0 to 10 V, gas type independent, pressure signal. INFICON capacitance manometers use an ultra pure alumina ceramic diaphragm which is corrosion proof. The advantages of the ceramic sensor are better signal stability, faster recovery from atmosphere, short warm up time and an extraordinary lifetime. INFICON CDG are high quality, cost effective pressure sensors for demanding semiconductor, plasma and vacuum applications. with EtherCAT digital interface available now ! (1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours...

Product characteristics

Accuracy (1)
0.4
on zero
0.005
on span
0.02
Pressure, max.
400
Resolution
0.003
Lowest reading
0.01
Lowest suggested reading
0.05
Lowest suggested control pressure
0.5
Operation (ambient) (4)
+10 … +50
Bakeout at flange
≤200
Storage
–40 … +65
Supply voltage
+21 … +30 V DC or ±15 V (±5%)
During Heat up
≤18
At operating temperature
≤12
Output signal (analog)
0 … +10
Response time (2)
30
Degree of protection
IP 40
CE conformity
EN 61000‑6‑2/-6-3, EN 61010 & RoHS
ETL certification
UL 61010‑1, CSA 22.2 No.61010‑1
SEMI compliance
SEMI S2
Electrical connection
D-Sub, 15-pin, male
Number of setpoints
2 (SP1,SP2)
Relay contact
≤30
Protocol
RS232-C
Read
pressure, status, ID
Set
set points, filter, zero adjust, factory reset, DC offset
Materials exposed to vacuum
Aluminum oxide ceramic (AI 2O 3), stainless steel (AISI 316L (3))
I. volume 1/2'' tube
4.2 (0.26)
I. volume DN 16 ISO KF
4.2 (0.26)
I. volume DN 16 CF-R
4.2 (0.26)
I. volume 8 VCR®
4.2 (0.26)
Weight 1/2'' tube
837
Weight DN 16 ISO KF
852
Weight DN 16 CF-R
875
Weight 8 VCR®
897
Protocol EtherCAT
protocol specialized for EtherCAT
Communication standards
Vacuum Pressure Gauge

Documents

Domain icon Manufacturer/ Producer

50968 Köln - Germany

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