High Precision Vacuum Gauges

1000 Torr, 1100 mbar
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Description

INFICON temperature compensated Edge CDG025D2 with EtherCAT Capacitance Diaphragm Gauge is a highly accurate vacuum measurement instrument designed for harsh manufacturing environments. The proven temperature compensated , corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Edge comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products. Advanced electronics offer a wide range of configurable signal conditioning for all applications with EtherCAT fieldbus interface. (1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours operation. (2) Increase 10 … 90 percent FS (3) For pressure control type only (4) 18% Cr, 10% Ni, 3% Mo, 69% Fe

Product characteristics

Accuracy (1)
0.2
on zero
0.005
on span
0.01
Pressure, max.
400
Resolution
0.003
Lowest reading
0.01
Lowest suggested reading
0.05
Lowest suggested control pressure
0.5
Sensor
25
Operation (ambient)
+5 … +50
Bakeout at flange
≤110
Storage
–20 … +65
Supply voltage
+14 … +30 VDC or ±15 V (±5%)
At operating temperature
≤1
Output signal (analog)
0 … +10
Response time (2)
30
Degree of protection
IP 40
CE conformity
EN 61000‑6‑2/-6-3, EN 61010 & RoHS
ETL certification
UL 61010‑1, CSA 22.2 No.61010‑1
SEMI compliance
SEMI S2
Electrical connection
D-sub, 15 pole, male
Number of setpoints
2 (SP1,SP2)
Relay contact
≤30
Protocol
RS232-C
Read
pressure, status, ID
Set
set points, filter, zero adjust, factory reset, DC offset
Materials exposed to vacuum
Aluminum oxide ceramic (AI 2O 3), stainless steel (AISI 316L (4))
I. volume 1/2'' tube
4.2 (0.26)
I. volume DN 16 ISO KF
4.2 (0.26)
I. volume DN 16 CF-R
4.2 (0.26)
I. volume 8 VCR®
4.2 (0.26)
Weight 1/2'' tube
837
Weight DN 16 ISO KF
852
Weight DN 16 CF-R
875
Weight 8 VCR®
897
Protocol EtherCAT
protocol specialized for EtherCAT
Communication standards
Vacuum Pressure Gauge

Documents

Domain icon Manufacturer/ Producer

50968 Köln - Germany

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