INFICON GMBH

Germany

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INFICON GMBH
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100 Products

Germany

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INFICON SKY CDG200D high temperature manometers are your best choice for accurate total pressure measurement and control. CDG200D gauges are temperature controlled at 200 °C for superior performance in demanding semiconductor and plasma processes. They are available for full scale ranges from 1 Torr to 1000 Torr, with all common flange types and fieldbus interfaces and provide a linear 0 to 10 V, gas type independent, pressure signal. INFICON capacitance manometers use an ultra pure alumina ceramic diaphragm which is corrosion proof. The advantages of the ceramic sensor are better signal stability, faster recovery from atmosphere, short warm up time and an extraordinary lifetime. INFICON CDG are high quality, cost effective pressure sensors for demanding semiconductor, plasma and vacuum applications. with EtherCAT digital interface available now ! (1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours...

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The INFICON Pirani Standard Gauges, PSG500 and PSG502-S, PSG510-S and PSG512-S employ the most advanced digital Pirani technology available in the marketplace. The rugged stainless steel sensor cell and compact design qualifies them for use on semiconductor systems and for standard applications, such as fore vacuum lines. The PSG500 / PSG502-S Pirani Gauge series are direct replacements for TTR 91 S / TTR96 S series: Part-No Typ Part-No Typ 350-060 PSG500 DN 16 ISO-KF = 230 035 TTR 91 DN 16 ISO-KF 350-061 PSG500 1/8" NPT = 230 038 TTR 91 1/8" NPT 350-062 PSG500 DN 16 CF-R = 230 036 TTR 91 DN 16 CF-R 350-068 PSG500 DN 16 CF-R, long = 230 037 TTR 91 DN 16 CF-R, long 350-080 PSG500-S DN 16 ISO-KF = 230 040 TTR 91 S DN 16 ISO-KF 350-081 PSG500-S 1/8" NPT = 230 043 TTR 91 S 1/8" NPT 350-088 PSG500-S DN 16 CF-R, long = 230 042 TTR 91 S DN 16 CF-R, long 350-140 PSG502-S DN 16 ISO-KF = 230 045 TTR 96 S DN 16 ISO-KF 350-148 PSG502-S DN 16 CF-R, long = 230 047 TTR 96 S DN 16 CF-R,...

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The INFICON Pirani Standard Gauge (PSG55x) employs like his brothers PCG55x and PSG50x the most advanced digital Pirani technology available. The rugged sensor design combined with the compact size and the variety of features qualifies it as the right product for measurement from low to the high vacuum range. The Pirani Gauge series PSG550 / PSG552 / PSG554 are direct replacements for the TTR 911 / TTR 916 series: Part-No Typ Part-No Typ 3PI1-001-2020 PSG550 FCC,2SP,PBus,16KF = 89650V01 TTR 911 PB, DN16 KF 3PI1-001-2010 PSG550 FCC,2SP,DNet,16KF = 89651V01 TTR 911 D, DN16 KF 3PI2-001-2020 PSG552 FCC,2SP,PBus,16KF = 89652V01 TTR 916 PB, DN16 KF 3PI1-001-1000 PSG550 FCC,LCD,16KF = 89654V01 TTR 911 LCD, DN16 KF 3PI2-001-1000 PSG552 FCC,LCD,16KF = 89656V01 TTR 916 LCD, DN16 KF 3PI2-001-1000 PSG552 FCC,LCD,16KF = 89656V01 TTR 916 LCD, DN16 KF 3PI3-001-0000 PSG554 FCC,16KF = 89658V01 TTR 911 CC, DN16 KF 3PI3-001-2020 PSG554 FCC,2SP,PBus,16KF = 89659V01 TTR 911 CC PB, DN16 KF 355-925...

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The INFICON Pirani Capacitance Diaphragm Gauge (PCG55x) combines the INFICON Pirani technology with the advantages of a ceramic capacitance diaphragm sensor in a single product. In the measurement range between 10 mbar and atmosphere the capacitance diaphragm technology provides gas-type independent, highly accurate values for reliable pressure measurement. The PCG55x offers also a variety of features which allows the right product configuration for the demanded application. This Pirani Capacitance Diaphragm Gauge series PCG550, PCG552, PCG554 direct replacement for TTR 101 series: Part-No Typ Part-No Typ 3PC1-001-0000 PCG550 FCC,16KF = 230350 V01 TTR 101 TTR 101, FCC, 16 KF 3PC1-00F-0000 PCG550 FCC,1/8NPT = 230351 V01 TTR 101 FCC, 1/8 NPT 3PC1-001-2000 PCG550 FCC,2SP,16KF = 230352 V01 TTR 101 FCC, 16 KF, 2SP 3PC1-00F-2000 PCG550 FCC,2SP,1/8NPT = 230353 V01 TTR 101 FCC, 1/8 NPT, 2SP 3PC1-001-1000 PCG550 FCC,LCD,16KF = 230354 V01 TTR 101 FCC, 16 KF, LCD 3PC1-00E-1000 PCG550...

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The INFICON Penning Gauge PEG100 provides reliable high vacuum measurements. The rugged penning cold cathode sensor has no filament to burn out. Due to titanium cathode plates and the reduced high voltage after plasma ignition, the gauge can be operated also in sputtering applications. The fieldbus options, in addition to the logarithmic analog output signal, allow easy integration into vacuum systems using Profibus DP or DeviceNet protocols. This Penning Gauge PEG100 series is direct replacement for Penning Transmitters of the PTR 225 / PTR 225 S / PTR 237 / PTR 225 PB / PTR 237 D series: Part-No Typ Part-No Typ 351-000 PEG100 DN 25 ISO-KF = 157 34 PTR 225 DN 25 KF 351-001 PEG100-S DN 25 ISO-KF, SP = 164 34 PTR225 S DN 25 KF, SP 351-002 PEG100 DN 40 CF-R = 157 36 PTR 237 DN 40 CF-R 351-005 PEG100-P DN 25 ISO-KF, PB = 896 41 PTR 225 PB DN 25 KF, PB 351-004 PEG100-D DN 40 CF-R, DevNet = 896 42 PTR 237 D DN 40 CF-R, DevNet 351-490 PEG100 Spare cathode plates (5 pcs) = 16291 PTR...

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The INFICON Inverted Magnetron Pirani Gauges, MPG400 and MPG401, measure from 5 x 10 -9 mbar toatmosphere (3.8 x 10 -9 Torr to atmosphere). Combining technologies into one single compact unit withone logarithmic analog out put signal significantly reduces the complexity of installation, setup an dintegration. This Cold Cathode inverted magnetron Gauge MAG400 series is direct replacement of the PTR 90 Transmitter series: Part-No Typ Part-No Typ 351-010 MPG400 DN25 ISO-KF = 230 070 PTR 90 DN25 KF 351-011 MPG400 DN40 ISO-KF = 230 071 PTR 90 DN40 KF 351-012 MPG400 DN40 CF-F = 230 072 PTR 90 DN40 CF 351-999 MPG400 Maintenance set = none 351-998 MPG400 Repair set = none 351-995 MPG400 Spare-ignition aid (10 pcs) = none 351-994 MPG400 Ignition tool set = none 351-023 MPG400 Magnetic shield = 230 073 V01 PTR 90 Magnetic shield Within our own INFICON channel we also offer the type MPG401, which is a metal sealed version of the MPG40x line. For further information please check out the...

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The INFICON Gemini Inverted Magnetron Vacuum Gauge is the workhorse for all vacuum measurement applications (pending). Gemini combines two sensor systems into one small device to measure from atmosphere to 1x10 – 9 mbar. The patented ultra-low magnetic stray field design opens up a whole new range of applications. A unique interchangeable dual chamber sensor unit avoids cleaning cycles and reduces maintenance, making Gemini the most robust and economical vacuum gauge of its kind. Gemini Cold Cathode and combination comes with fully integrated digital electronics, providing ultimate flexibility for system integration. Cold cathode and Pirani combination option provides seamless transition, reliability, practicality and flexibility across wide ranging applications. MPG500 series represents the latest Technology to act as direct replacement for Cold Cathode or Penning Transmitters of the PTR 90 / PTR 225 (analog Versions) series. Part-No Typ Part-No Typ 3MB0-006-000P MPG500 SS,...

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The INFICON Bayard-Alpert Pirani Combination Gauge, BPG400, functions as two gauges in a single compact unit measuring from 5×10 -10 mbar to atmosphere (3.8×10 -10 Torr to atmosphere). Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG400 for affordable and repeatable process to base pressure measurements in one economic package. This Bayard Hot Ion Pirani combination Gauge BPG400 series direct replacement for the ITR 90 series: Part-No Typ Part-No Typ 353-500 BPG400 DN 25 ISO-KF = 120 90 ITR 90 DN 25 ISO-KF 353-502 BPG400 DN 40 CF-R = 120 92 ITR 90 DN 40 CF-R 353-505 BPG400-SP ProfiBus, DN 25 KF = 230 030 ITR 90 DN 25 ISO-KF 353-506 BPG400-SP ProfiBus, DN 40 CF-R 230 031 ITR 90 DN 40 CF-R 353-501 BPG400 LCD, DN 25 ISO-KF = 120 91 ITR 90 DN 25 ISO-KF Displ. 353-503 BPG400 LCD, DN 40 CF-R = 120 94 ITR 90 DN 40 CF-R Displ. 354-490 BPG400 Spare-Sensor DN 25 ISO-KF = E 121 02 ITR 90 Spare-Sensor IE90 DN 25 KF 354-491 BPG400...

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The INFICON Bayard-Alpert Pirani Combination Gauge, BPG402-S, functions as two gauges in a single compact unit measuring from 5×10 -10 mbar to atmosphere (3.8×10 -10 Torr to atmosphere). Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG402-S with two yttrium oxide coated iridium filaments for affordable and repeatable process to base pressure measurements in one economical package. Sensing elements with on-board calibration data guarantees high reproducibility when exchanging sensors. This Bayard Hot Ion (Dual Filament) Pirani Combination Gauge BPG402-S series direct replacement for Hot Ion - Pirani Transmitters of the ITR 200 series: Material-No Typ Material-No Typ 353-570 BPG402-S DN 25 ISO-KF = 230 250 ITR 200 S DN25 KF 353-574 BPG402-SP ProfiBus, DN 25 ISO-KF = 230 252 ITR 200 SP DN25 KF, PB 353-571 BPG402-S DN 40 CF-R = 230 254 ITR 200 S DN40 CF-R 353-576 BPG402-SD DeviceNet, DN 25 ISO-KF = 230 253 ITR 200SD DN25 KF,...

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Sustainable solution for process measurement, control and data log Compatible to the wide range of INFICON active gauges, the new VGC50x series of active gauge controllers are able to monitor and data log the entire pressure range from 10⁻¹⁰ to 1500 mbar (10⁻¹⁰ to 1125 Torr) and the set point status. The new VGC50x Active Gauge Controller series is the advanced successor of the discontinued VGC40x series which was the 1:1 compatible product Leybold`s Center-Controller line Material-No Typ 230 002 Center ONE 235 002 Center ONE (USA) 230 004 Center TWO 235 004 Center TWO (USA) 230 003 Center THREE 235 003 Center THREE (USA) As the direct successor for these series the new and advanced VGC50x series is able to accept all INFICON Active Gauges Successor product for VGC40x Controller series 1×10 -3×F.S. …1×F.S. 1×10 -3×F.S. …1×F.S. 1×10 -3×F.S. …1×F.S. 5×10 -4…1500 5×10 -4…1500 5×10 -4…1500 5×10 -10…1500 5×10 -10…1500 5×10 -10…1500 mbar, Torr, Pa, hPa, Micron, V mbar, Torr, Pa,...

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INFICON GMBH

Bonner Strasse 498

50968 Köln - Germany

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