INFICON GMBH

Process Characterization Software For The Transpector Gas Analysis System With one-click access to the two most popular RGA functions: monitor and leak check modes, FabGuard Explorer provides you with easy to interpret data showing the most frequently monitored gases (hydrogen, water vapor, nitrogen, oxygen, argon, etc.) in a convenient trend display. FabGuard Explorer is Windows® 8 ready, providing comprehensive RGA software with no concerns about operating system compatibility. The single-sensor version of FabGuard Explorer is a cost-effective solution to operating one Transpector ® RGA. With the software’s multi-sensor version, you can control multiple, different types of Transpector RGAs from a single computer. FabGuard Explorer allows for control of both Transpector MPH and Transpector 2 RGAs from the same software. For connecting multiple Transpector MPH sensors, INFICON offers routers and network switches, while the TCA485 Transpector Communications Adapter is used for...

NON-INVASIVE, CLAMP-ON RF DETECTOR DELIVERS HIGH-SPEED ARC DETECTION IN iPVD, PECVD AND ETCH Reducing Wafer Loss and Improving Yields Arcing during plasma processing can result in target and chamber damage leading to substrate damage and particle creation. As feature sizes decrease, microelectronic devices become increasingly susceptible to arc-induced damage. Arcing can occur in any plasma assisted process such as ionized Physical Vapor Deposition (iPVD), Plasma Enhanced Chemical Vapor Deposition (PECVD) and Etch. The INFICON Sion Arc Detector provides a crucial first line of defense. Sion makes it possible to detect micro-arcs quickly and react to them before significant damage or scrap occurs. The system provides real-time detection and analysis of plasma micro-arcing events.

Sion™ RF Detector gives you tighter control and higher yields in chemical vapor deposition (CVD) and etch processes by reliably and accurately determining the chamber clean endpoint. More accurate endpointing means lower on-wafer particle levels and more time between preventative maintenance cycles. Providing a number of advantages over optical emission spectrometer (OES)-based controllers, Sion works with FabGuard® Integration and Analysis System to reduce the wasted time and materials that result from chamber clean under- or over-etching.

RF Sensor with FabGuard Provides Real-time Plasma Process Analysis to Significantly Reduce Process Variability INFICON RF sensor technology provides highly accurate, broadband, frequency discriminant RF measurement for semiconductor processing tools. This RF data provides detailed insight on actual plasma conditions of both process development and production process problems to significantly reduce process variability. The latest in its suite of advanced process control in situ sensors, this non-intrusive in-line cable mount RF sensor combines with FabGuard Sensor Integration and Analysis Systemto offer critical diagnostic information, e.g. accurate chamber and process power and impedance measurement, root cause analysis of faults (such as matching network problems), process fingerprinting for chamber matching, and wafer metrology modeling in PVD, CVD and etch applications. INFICON RF sensor technology with FabGuard generates highly accurate models that predict wafer metrology...

The ADC100 system connects to a DC power generator in order to detect plasma arcing in real time. This provides the ability to interrupt a wafer process and notify engineers of potential hardware or product damage.

Fabwide, Process Specific FabGuard FDC combines on-line Fault Detection and Classification (FDC) capabilities with powerful tools for fab engineers to readily analyze virtually any aspect of process and equipment behavior. No other system provides greater capability to guard against wafer loss, reduce unscheduled tool downtime and improve yield. Regardless of wafer size or product geometry, timely information is key to fab productivity and competitiveness. The increasing pressure to reduce costs makes it critical to maximize fab productivity, reduce the number of scrapped wafers and maximize equipment utilization. FabGuard meets the challenges of today’s semiconductor manufacturing by combining the collective experience of statisticians and engineers tasked with maintaining cutting edge fab productivity. FabGuard FDC is built on the principle that process and equipment knowledge is crucial to smooth fab operations. Redefining FDC - FabGuard Detection and...

Advanced Modeling, Data Analysis and Visualization Capabilities Made Simple Increase Yield by Expanding Process Data Analysis FabGuard Analysis Server (AS) makes it possible to analyze every variable in the factory to apply advanced multivariate SPC and modeling. Detecting faults caused by the interactions of multiple process variables is accomplished with the many advanced multivariate analysis tools in FabGuard AS. FabGuard Analysis Server can easily expand the capabilities of existing FDC systems by enabling engineers to detect faults not typically monitored by univariate SPC. Many faults are caused by the complex interaction of multiple equipment and process parameters. FabGuard AS provides multiple advanced techniques to perform Fault Detection, Fault Classification and Metrology Prediction. These tools highlight excursions that simple univariate FDC systems will never detect. FabGuard AS provides engineers a powerful toolbox to uncover hard to detect faults.

INTEGRATED MANAGEMENT OF TOOL RECIPES Increasing complexity of manufacturing and requirements for better process control requires better integration and management. Seamless integration of FDC and Factory Automation and Equipment Control is critical for providing accurate excursion prevention and tight control over the operation of factory equipment. FabGuard™ Recipe Management System helps Semiconductor, Display and Solar manufacturers meet these challenges by providing central archival and management of process equipment recipes. As an add-on to the FabGuard Fault Detection and Classification System, FabGuard FG-RMS expands existing FabGuard systems to include the capabilities required to manage tool process recipes across the factory. CENTRAL MANAGEMENT INCREASES PRODUCTIVITY FabGuard provides central management of tool process recipes using the familiar and robust FabGuard infrastructure. Engineers can view, edit, deploy and manage process recipes from their desktop or...

Integrated Out of Control Action Plans Increasing complexity of manufacturing and the need to correct issues in real time requires that everyone has access to expert knowledge that can be used to minimize downtime and correct issues. FabGuard eOCAP provides a framework for capturing complex knowledge assets and delivering them intuitively and interactively to users at the moment they need them, via a web browser. FabGuard eOCAP enables both expert and non-expert users to collaborate in capturing, delivering, maintaining, and improving this vital content. Knowledge Management System FabGuard eOCAP helps organizations move beyond traditional knowledge repositories, interactively helping non-experts find and apply the right knowledge through relevant and properly sequenced multi-step processes. Additionally, FabGuard eOCAP can learn and constantly react to the changing relevance of different articles. The system helps factories to capture and automate the logical flow of...

Timely information is essential for increasing fab productivity and remaining competitive in the market place. The pressure to enhance profitability makes it critical that a factory is productive and flexible, while increasing yield and throughput. FabGuard APC saves both time and money in factory operations by executing run-by-run (RbR) control strategies that drive process results to achieve target regardless of day-to-day equipment or process drift. APC systems collect product measurements and recipe set points which are used to calculate new recipe set points that optimize wafer processing. The use of an APC System maximizes overall product yields and increases profit by making sure that each wafer performs as close to end of line metrics as possible. Benefits FabGuard APC increases yields, reduces costs and enhances manufacturing by providing optimal process set points to compensate for equipment and environmental variations. Strategy and Flow FabGuard APC provides you with...