The high-performance membrane of the MEMS IR chips achieves membrane temperatures of up to 850 ° C. It allows a high and long-term stable radiation performance. These nanoamorphic carbon (NAC) emitters are a new class of nanostructured materials. By combining standard silicon material technology with NAC coatings, Micro-Hybrid now offers a new generation of MEMS products with exceptional performance Special customization options: • the adjustment of the current input power, • a high modulation frequency • and the unique Hermeseal ® sealing technology for hermetically sealed components IR radiation source for the use with thermopile or pyroelectric detectors for NDIR gas analysis and other applications.

  • IR sources
  • IR emitter
  • NDIR

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