Inspection and review system for the inspection of samples with a diameter of 12 inches/300mm. Integrated macro mode for four times the field of view of conventional scanning objectives. Top resolution from any angle with the Oblique UV mode (OUV), which combines oblique illumination with UV light. Optimized airflow in the cleanroom due to the integrated LED illumination. With only one touch of a button magnification, illumination and contrast methods can be changed.

Machine vision system

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