Description

As more industries discover the speed, controllability, and bottom-line benefits of magnetron sputtering, Angstrom Sciences is developing tools to maximize the output of these larger, faster manufacturing processes. Broader Solutions For those who have to coat extremely broad substrates or have to achieve extremely high throughput, linear magnetrons offer the perfect solution. ONYX Linear Magnetron Patented Advantages Angstrom Sciences’ linear magnetrons incorporate our fully-encapsulated patented profiled NdFeB rare earth magnets and turbulent water flow to provide unparalleled performance. Standard Fittings We use ISO NW standard fittings, as well as Conflat® metal seal flanges. All utilities are maintained at atmosphere and accessed through standard O-ring compression fittings for easy installation in any vacuum system. Total Power Compatibility Low-impedance heads provide RF, DC, mid-frequency DC, pulsed DC, and microwave power compatibility.

Thin coating for integrated circuits
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