MICRO-EPSILON MESSTECHNIK GMBH & CO. KG

The compact confocal IFD2411 measuring system is a factory-calibrated measuring system for industrial series applications. As well as displacement and distance measurements, the system enables even thickness measurements of transparent materials. The IFD2411 confocal chromatic measuring system is a complete channel which contains a controller and an adapted sensor with measuring ranges of 1 mm, 2 mm, 3 mm and 6 mm. This measuring system is ideal for series applications.

The confocalDT IFD2415 and IFD2410 are powerful confocal sensors with integrated controller. The space-saving IP65-housing enables fast integration into plant equipment and machines as no optical fiber is required. Furthermore, the IFD2410 and 2415 are ideally suited to high precision distance and thickness measurements in industrial series applications. In addition, the IFD2415 can be used with transparent materials for multi-layer thickness measurements of up to 5 layers. The active exposure time regulation of the CCD line enables fast and stable measurements of varying surfaces even in dynamic processes up to 25 kHz. The measuring system is also characterized by high luminous intensity which enables fast and reliable measurements even on dark surfaces.

The confocalDT 2421 and 2422 controllers are used for distance and thickness measurements of diffuse reflecting and specular surfaces. Available as either a single- or a dual-channel version, these confocal chromatic measuring systems offer a low cost solution especially for series applications. The active exposure regulation feature in the CCD array enables accurate, fast surface compensation on changing surfaces. This controller is compatible with all sensor types of the IFS series covering numerous measurement tasks. The controller is optionally available as a multi-peak version for multi-layer thickness measurements. Using a special calculation function, the confocalDT 2422 dual-channel version evaluates both channels. Measurement acquisition is synchronous and can be carried out while exploiting the full measuring rate for both channels.

The confocalDT 2465 and 2466 confocal controllers are used for fast, high-precision distance and thickness measurements and achieve resolutions in the nanometer range. These multi-peak models simultaneously measure the thickness of up to 5 transparent layers. The controllers are characterized by high luminous intensity combined with a high measuring rate of up to 30 kHz. This enables high signal intensity even on dark or rough surfaces. The fast exposure control perfectly compensates for changing surfaces.

The innovative white light interferometers from Micro-Epsilon set a benchmark in high-precision distance and thickness measurements. These sensors enable stable measurement results with sub-nanometer resolution offering a comparatively large measuring range and offset distance. The interferometers are available in 3 series: the IMS5400-DS for high-precision industrial distance measurements, the IMS5400-TH for accurate thickness measurements and the vacuum-suitable IMS5600-DS for distance measurements with picometer resolution.

New interferometer sensors with different designs and properties are available for the integration in demanding environments. Due to its 90° beam path, the IMP-DS0.5/90/VAC can also be mounted in low installation spaces. The new IMP-DS1/VAC miniature sensor is one of the smallest optical sensors from Micro-Epsilon. With a diameter of 4 mm and an integrated cable, the sensor can also be used in extremely confined installation spaces. Sensors and cables can be used both in the clean room and in a vacuum.

White light interferometers use infrared light in the non-visible range (approx. 840 nm wavelength), which means that the measurement position cannot be seen. To visualize the measuring position, Micro-Epsilon systems are equipped with a pilot laser which projects a light spot onto the measuring position. In addition, the pilot laser uses a patented method to provide feedback on the distance in addition to the measurement position. If the measuring object is at the correct distance and within the measuring range, a constant glow is emitted by the pilot laser. If the measuring object is outside the measuring range, the pilot laser flashes.

The new IMS5400-DS white light interferometer opens up new perspectives in industrial distance measurement. The controller has an intelligent evaluation feature and enables absolute measurements with nanometer accuracy at a relatively large offset distance. Compared to other absolute measuring optical systems, the IMS5400-DS offers an unsurpassed combination of accuracy, measuring range and offset distance.

The new IMS5400-TH white light interferometer opens up new perspectives in industrial thickness measurement. The controller offers an intelligent evaluation feature and enables the thickness measurement of transparent objects with highest precision.

The IMS5420 is a high-performance white light interferometer for non-contact thickness measurement of monocrystalline silicon wafers. The controller has a broadband superluminescent diode (SLED) with a wavelength range of 1,100 nm. This enables the thickness measurement of undoped, doped and highly doped SI wafers with only one measuring system. The IMS5420 achieves a signal stability of less than 1 nm. The thickness can be measured from a distance of 24 mm.