Description

Our patented CMP conditioners are based on a unique process of bonding diamond grit to a substrate by depositing Chemical Vapor Deposition (CVD) diamond over the grit. This process results in an all-diamond surface that provides superior diamond retention by chemically bonding the diamond grit to the substrate. Characteristics Performance Customised Designs Process Flexibility Distinctive Design The patented CMP conditioners are based on a unique process of bonding optimally-selected diamond grit to a proprietary ceramic substrate by depositing a conformal layer of diamond over the substrate by a Chemical Vapor Deposition (CVD) process. This process results in an all-diamond surface that provides superior diamond grit retention by chemically bonding the diamond grit to the substrate. Unlike conventional conditioners, this all-diamond surface is also chemically inert to all CMP slurries, eliminating grit pullout due to corrosion or wear. In addition, the high hardness CVD diamond...

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