Rapidscan

Features

Description

RapidScan™ technology is a combination of mechanical design and highend digital electronical solutions which allows to speed up your AFM by an order of magnitude keeping 90 µm inplane scaninng range. All three access are equipped with highprecision closedloop capacitive sensors.

  • Optical measuring equipment
  • Rapidscan Technology
  • Capacitive Sensors

Product characteristics

Parameter
Value
Travel range (XY/Z), μm
90×90×4 ±10%
Closed loop sensors (XYZ)
Capacitive
Sample size, ⌀ mm
15
Vertical noise floor, pm
30
XY position noise (Closed Loop), nm
0,1
Nonlinearity, %
0,1
Resonance Frequency (XY/Z), kHz
0,8/12
Active resonance damping
Automatically tuned 4-th order IIR digital notch-filters

Domain icon Manufacturer/ Producer

124460 Moscow - Russia

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