Residual Gas Analyzers (RGA) and Mass Spectrometers

Tool Management, Process Specific INFICON Sensor Integration and Analysis Systems provide process verification and control, including run-to-run control of key process parameters for process optimization and immediate and automatic feedback to the process equipment or a process engineer on any faults detected and their probable cause. FabGuard Sensor Integration and Analysis System takes data from in situ sensors, integrates that data with data from the process equipment itself, and condenses and analyzes it to provide the process engineer with actionable information. Alternatively, the engineer can choose to have FabGuard automatically send control commands directly to the process equipment. Powerful Data Management for Enhanced Productivity Make your fab's data work for you. The FabGuard Sensor Integration and Analysis System enhances tool productivity, by providing process control, and reducing losses from process drift, contamination, tool malfunction, or unnecessary test...

Real-time Endpoint Detection and Leak Detection The INFICON Quantus LP100 Gas Analyzer provides real-time leak detection and endpoint detection for your critical process environments. Many processes are sensitive to leaks or require endpoint detection. The Quantus LP100 is a gas analyzer that is designed to react to small changes in sensitive process environments in real-time so that scrap is minimized and yields are improved.

Some variants of the QMG 700 will be discontinued Jan 31, 2018 Exceeding Detection Limits with Superior Stability and Refined Resolution Rapid advancements in semiconductor manufacturing technology rely on swift and dependable gas analysis solutions. In the fab or in the lab, select the INFICON QMG 700 Analytical Mass Spectrometer to break through detection barriers and propel your process to the next level of innovation. The QMG 700 provides unparalleled performance and adaptability in a modular design. Enhance your competitive edge with the QMG 700, and achieve a superior level of measurement capability. Select from a wide range of ion source, mass filter, and RF power supply options, to tailor your QMG 700 to specific applications. The QMG 700 boasts more than nine decades of dynamic range and ppb detection limits, making it the ideal instrument for ultra high vacuum measurements. QMG 700 provides unit resolution across its entire mass range, and even higher resolution for...

Self-Contained Cart for Mobile Troubleshooting The INFICON Mobile Cart allows the Transpector CPM (Compact Process Monitor) to become a mobile troubleshooting instrument. The self-contained cart allows the system to be transported from tool to tool with the flexibility to adjust to various tool heights. the mechanical arm mechanism permits the sampling system to twist, rotate and move vertically which makes this Mobile Cart perfect for tight production spaces.