Semiconductor Process Chambers

Semiconductor Products


For over 60 years the Technical Ceramics business of been the premium supplier of custom ceramic components for chemical, electrical, mechanical, and vacuum applications. We serve semiconductor industry customers around the world. Parts are normally manufactured from our developed and produced material compositions to customer defined designs. Applications Lithography Implant CVD, PVD, Etch Flat panel display Materials, Capabilities and Services Aluminas (94 to 99.9%), Aluminum Nitride, Fused Silica Controlled microstructures Very high purity, consistency, and uniformity Low particle generation materials Sizes to one meter High tolerance ceramic machining/polishing Complete documentation and traceability CAD/EDI and engineering design support Metal/ceramic assemblies (Susceptors, Electrostatic Chucks, etc.) Near net shape processing For more information about our semiconductor process chambers contact us today.

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