Key Features: • Heterodyne displacement interferometry. • Highly stable, easy to align, and insensitive to signal amplitude changes. • Extremely robust for OEM applications. • A single laser source can support multiple axes. • High signal to noise phase measurements enable high precision and eliminate false counts, even at zero slew rates. ZYGO is the technology and application support leader in heterodyne displacement interferometry, offering complete solutions and support for your OEM metrology application. ZYGO's technologies and OEM products have been field proven over many years of use in leading-edge production facilities. Typical Applications • Lithography tools: optical lithography steppers and scanners, e-beam & laser mask writers • Metrology tools: Mask and wafer inspection and measurement tools, CD-SEMs • Calibration: Measurement and calibration of high resolution or high frequency mechanical...

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