Step Height Surface Profiling Applications Many precision manufacturing processes require step height measurements with a high degree of repeatability and accuracy. ZYGO's NewView™ optical profilers can measure step heights up to 20000 µm with sub-nanometer resolution. Depending on the model, ZYGO's NewView™ surface profilers can measure a variety of step heights. The height difference between two discontinuous planes, up to 20 mm, is most effectively handled by ZYGO's Coherence Scanning Interferometry (CSI) technology. It is also possible to measure the angle of the surfaces using this technique.