Thin Film Deposition
IC6
Description
MAKING EXCELLENCE REPEATABLE Feature-Rich IC6 Provides the Best Measurement Precision Possible The IC6 Thin Film Deposition Controller provides exceptional value by combining the proven performance of INFICON thin film controllers with unique features, all designed for you to achieve the most from your deposition process. The IC6 uses our ModeLock frequency measurement system to provide stable, high-resolution rate and thickness measurement with an industry-leading rate resolution of 0.00433 Å/s every 1/10 second. No other quartz crystal controller has the performance, quality, and features of the IC6, allowing you to make excellence repeatable. 1 Å for 0 to 9.999 kÅ 10 Å for 10.00 to 99.99 kÅ 100 Å for 100.0 to 999.9 kÅ 1 kÅ for 1000 to 9999 kÅ 0.001 for 0 to 9.999 Å/s if rate filter time setting is 10 seconds or greater 0.01 for 0 to 99.99 Å/s 0.1 for 100 to 999.9 Å/s 100 – 230 V (ac) +/- 15% 50 / 60 Hz +/- 3 Hz (1) Tooling/density = 100/1, fundamental frequency = 6 MHz (2)...
Product characteristics
- Frequency resolution
- ±0.0035 Hz @ 6 MHz
- Thickness and rate resolution/measurement (1)
- ±0.00433 Å
- Measurement frequency range
- 6.0 to 4.5 MHz (fixed)
- Thickness accuracy (2)
- 0.5%
- Measurement interval
- 0.10 s
- Multiple measurement averaging
- 0.1, 0.4, 1.0, 4.0, 10.0, 20.0, and 30.0 sec. averaging allowed
- Auto Z
- yes
- Autotone
- yes
- Co-deposition
- yes (up to 6 sources)
- Material programs
- 32
- Process layers (per process)
- 200
- Processes
- 50 (processes can be linked together)
- USB memory
- yes
- Data logging
- yes
- Dual / CrystalTwo®
- 4 / 8 (with CrystalTwo ® Switch)
- Number of sources (4)
- up to 6
- Source control voltages
- 0 to +/-10 V, adjustable
- Output resolution
- 15 bits over full range (0 to 10V)
- Crucible positions
- 64
- Inputs
- 14 standard, up to 28 optional; TTL/CMOS logic compatible or closure to ground
- Outputs
- 8 standard, up to 24 optional programmable SPST relays rated at 30 V(dc) or 30 V(ac) RMS or 42 V pea
- Recorder output (4)
- 0 to +10 V, adjustable
- Logic statements
- 100 fully programmable; up to 5 actions, 5 events per statement
- Standard
- RS232
- Optional
- Ethernet
- Thickness resolution
- 1 Å for 0 to 9.999 kÅ 10 Å for 10.00 to 99.99 kÅ 100 Å for 100.0 to 999.9 kÅ 1 kÅ for 1000 to 9999 k
- Rate resolution
- 0.001 for 0 to 9.999 Å/s if rate filter time setting is 10 seconds or greater 0.01 for 0 to 99.99 Å/
- Power requirements
- 100 – 230 V (ac) +/- 15% 50 / 60 Hz +/- 3 Hz
- Operating temperature
- 0 to 50 C (32 to 122 F)
- Dimensions, excluding mounts (h x w x d)
- 5.25" x 19" x 13" (133mm x 483mm x 330 mm)
- Weight
- 23 lbs (10.5 kg)
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