Description

The SQM-160 uses proven INFICON quartz crystal sensor technology to measure rate and thickness in thin film deposition processes. Two sensor inputs are standard and four additional sensor inputs are optional. Two recorder outputs provide analog rate and thickness signals. Sensor inputs can be assigned to different materials, averaged for accurate deposition control in large systems, or configured for a dual sensor. The rate sampling mode allows a shuttered sensor to extend sensor life in high rate processes. Rate displays of 0.1Å/s or 0.01Å/s are user selectable. In addition, Frequency or Mass displays can be selected. Four relay outputs allow the SQM-160 to control source or sensor shutters, signal time and thickness setpoints, and signal crystal failure. Digital inputs allow external signals to start/stop and zero readings. Standard: RS-232; Optional: USB or Ethernet Standard: RS-232; Optional: USB or Ethernet Class 1 equipment, 73/72/EEC LVD, 89/336/EEC ECD Class 1...

Product features

QCM Sensor Inputs 2; optional: 4
Measurement Frequency Range 1.0 MHz minimum 6.5 MHz maximum
Frequency Resolution (1) ± 0.30 Hz
Thickness and rate resolution/measurement (2) ± 0.37 Å
Measurement Interval 0.10 to 2.0 s (adjustable)
Measurement Filter 1 to 20 readings
Stored Films 99
Analog Outputs Two 0 to 5 VDC, rate & thickness
Digital Inputs/Outputs Four inputs, four relay outputs
Communications Interface RS-232; Optional: USB or Ethernet
Power 100-120/200-240 VAC, 50/60 Hz, 20 W
CE Compliance Class 1 equipment, 73/72/EEC LVD, 89/336/EEC ECD
Housing/Mounting 1/2-rack cabinet, 3-1/2" high, 89 x 213 x 197mm (3-1/2" x 8-1/2" x 7-3/4")
Weight 2.7 Kg (6 lbs)
Windows Software (included) Provides remote setup and operation, datalogging functions - see sample screenshot at right.

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