ZYGO CORPORATION

Production Ready 3D Optical Profiler System The ZeGage™ Pro and ZeGage™ Pro HR 3D optical profilers provide non-contact measurement and characterization of micro- and nano-scale features of many types of surfaces, ensuring quality control and process monitoring in your manufacturing environment. Our industry-leading ZeGage Pro-series sets the standard for performance, ease of use, flexibility, and precision of benchtop-class industrial non-contact surface profilers. Built on ZYGO’s proprietary CSI technology, the ZeGage Pro delivers innovative technologies to enable precise, reliable, simple, and confident surface metrology. Exclusive capabilities include SureScan™ technology for vibration robust metrology, Part Finder, and Smart Setup for simplified part setup and optimized measurements. It’s never been simpler to measure a wide variety of surfaces and parts, quickly and easily. Read more to see how the ZeGage™ Pro systems' power, versatility, and value can benefit you.

The NewView™ 9000 3D optical surface profiler provides powerful versatility in non-contact optical surface profiling. With the system, it is easy and fast to measure a wide range of surface types, including smooth, rough, flat, sloped, and stepped. All measurements are nondestructive, fast, and require no sample preparation. At the core of the system is ZYGO's Coherence Scanning Interferometry (CSI) technology which delivers sub-nanometer precision at all magnifications, and measures a wider range of surfaces faster and more precisely than other commercially-available technologies, thus optimizing your return on investment. Performance, Value, and Versatility Flexibility is the hallmark of ZYGO's NewView products. The NewView 9000 profiler offers exceptional value with applications as varied as flatness, roughness and waviness, thin films, step heights and more.

Designed for the most demanding applications, the Nexview™ NX2 3D optical profiler combines exceptional precision, advanced algorithms, application flexibility, and automation into a single package that represents ZYGO's most advanced Coherence Scanning Interferometric (CSI) profiler. The completely non-contact technology optimizes the return on investment by delivering sub-nanometer precision at all magnifications and measuring a wider range of surfaces faster and more precisely than other comparable technologies commercially available. With applications as varied as flatness, roughness and waviness, thin films, step heights and more on virtually any surface and material, Nexview NX2 truly is the no-compromise profiler.

Micro Lens Process Metrology Systems ZYGO's Compass™ metrology systems set the benchmark for automated, non-contact 3D surface metrology and process control for discrete micro lenses and molds critical to compact imaging systems such as automotive vision systems and cameras for smart phones and tablets. There are two models of Compass™ systems available, depending on your metrology needs... Compass – ZYGO's advanced solution for precision metrology of micro lens surface form and deviation, topography, and relational/dimensional parameters. This is the ideal choice for applications that require complete characterization of spherical or aspherical micro lenses and their alignment features. Compass RT Metrology SystemCompass RT – A fast and flexible system for precision metrology of micro lens relational/dimensional parameters, plus general profilometry applications. This is the ideal choice when form deviation metrology is not required.

Large Format Inspection & Metrology Nexview 650The Nexview™ 650 metrology system is an inspection tool for automated measurement of injection molding tooling, PCBs, glass panels and other samples requiring an extended work volume up to 650 x 650 mm. It provides 2D & 3D measurements of a variety of surface features with sub-nanometer vertical precision and sub-micron lateral precision. Coherence Scanning Interferometry (CSI) is the measurement technology at the core of the Nexview™ 650 system. This non-contact technique provides high-precision, and high-value surface metrology benefits including: Measures virtually all types of surfaces, from rough to super smooth, including thin films, steep slopes, and large steps. Sub-nanometer measurement precision is independent of field magnification Gage capable performance - exceptional precision and repeatability for the most demanding production applications. SureScan™ vibration tolerance technology - [...] Click to read more

Leverage and integrate our industry-leading technology OEM 3D Optical Profiler SensorDo you have a need for precise, high-speed, non-contact surface metrology and inspection? Are you an OEM manufacturer or system integrator looking to partner with a leading company with the experience to ensure your success? ZYGO's 3D Optical profilers are now available as a fully integrable solution with a long history of successful production integrations. Why partner with ZYGO? We bring decades of experience working with OEM manufacturers serving critical in-line metrology, inspection and process control for advanced manufacturing applications. Key industries served include: Consumer Electronics Automotive & Precision Machining Semiconductor Optics & Photonics

Optimize efficiency by using your ZYGO optical profiler right on the shop floor. Guardian Industrial EnclosureNow you can meet the most rigorous standards for precision metrology under challenging environmental conditions. Our Guardian™ enclosures isolate the metrology core from the surrounding environment, so you get optimal performance when and where you need it. Designed and built by ZYGO exclusively for our optical profilers, Guardian™ enclosures are built to perform and last. Ergonomic Design The system is designed to be a self-contained unit, which can be operated from standing or seated positions. All user interface peripherals can be positioned and adjusted. A large front-side opening makes the task of loading and unloading test parts and fixtures simple and efficient. The unit's interior lighting conveniently illuminates the work area as well. For serviceability, access panels are also provided around the unit.

When specifying a 3D optical metrology solution, it is important to appreciate that not all tools are the same, and users should look for solutions characterized by their speed, superior measurement precision, magnification range, and the ability to measure a broad spectrum of surfaces from the super-smooth to the extremely rough. ZYGO's Coherence Scanning Interferometry (CSI) based 3D Optical Profilers deliver best in class performance in all of these categories. These systems use the principle of optical interference to measure a sample. Coherence Scanning Interferometry Diagram:as shown in the image, illumination is divided into two paths where one travels to a precision reference surface, and the other travels to the test surface. The reflections from these two surfaces combine at a camera detector where they interfere with each other, and a pattern of light and dark intensities is created ... Click to read more

Automated Measurement Configuration ZYGO’s 3D optical profilers have an incredible variety of metrology possibilities and potential applications. In order to save the time and effort required to get started with a new application, ZYGO introduced the exclusive SmartSetup™ technology on all of the latest generation 3D optical profilers. SmartSetup takes all the guesswork out of the four most critical setup tasks for an optical profiler: Finding the part Setting the appropriate light level Setting the appropriate scan range Collecting the first measurement These tasks could take an operator several minutes to perform manually, and usually require training and practice in order to do them confidently and efficiently ... Click to read more

Vibration Robust CSI Technology Manufacturing environments can present challenges in using precision metrology instruments right on the shop floor. Vibration, for example, can negatively affect the quality and precision of surface measurements in real-world conditions, often requiring special modifications, equipment relocations, or other compromises to address and solve the issues. To enable high precision, reliable and quality metrology in all environments, ZYGO has developed a proprietary technology, called SureScan™. With SureScan, hardware and software work in tandem to detect vibration during every measurement and eliminate it before it has a chance to corrupt the data. This is all done with no special calibrations by the user, and with no impact on measurement time. With SureScan technology, you maintain the benefit of nanometer or sub-nanometer sensitivity of ZYGO’s CSI based profilers while placing it anywhere in your facility ... Click to read more