Plasma-Surface-Treatment-System | Tetra 45

Low-pressure Plasma system, Plasma-Surface-Treatment-System, Plasma Cleaner
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Description

Plasma systems from Diener electronic have long since established themselves in a wide range of industrial sectors. With the Tetra 45 low-pressure plasma system, you can rely on modern and future-proof cold plasma technology in a vacuum. The chamber volume of approx. 45 litres of this plasma system offers enough space to serve series production / automation. Low pressure plasma treatment is a proven technique for controlled ultra-fine cleaning, adhesion enhancement (activation and etching) and coating of thin films on substrate surfaces. Plasma is generated by applying high-frequency voltage in the vacuum chamber. In the process, the process gas introduced there is ionised. Fields of application: VOC-free cleaning of organic residues Activation before painting, gluing, potting, ... Etching of PTFE, photoresist, oxide layers, ... Super-hydrophobic and -hydrophilic coatings

  • Surface treatment - machinery and equipment
  • Surface treatment
  • Low-pressure plasma system
  • Plasma cleaner

Product characteristics

Dimensions (Stand Alone)
870 mm x 1700 mm x 1000 mm (WxHxD)
Vacuum Chamber material
Aluminium
Vacuum Chamber dimensions
approx. 572 mm x 125 mm x 650 mm (WxHxD)
Vacuum Chamber volume
approx. 45 litres
Vacuum Chamber closure
Hinged door, automatic door
Gas supply
Mass flow controllers (MFCs)
Pressure measurement
Pirani, Capacity pressure gauge
Generator
80 kHz; 100 kHz; 13,56 MHz; 2,45 GHz
Electrodes
According to customer requirements
Controles
Basic PC (Win.CE), Full PC (Win.10 IoT)
Power supply
400 V / 50 - 60 Hz
Vacuum pump
According to customer requirements

Domain icon Manufacturer/ Producer

72224 Ebhausen - Germany

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