ZYGO CORPORATION

ZYGO position sensors are widely used in closed-loop motion control systems, mainly for lithography and inspection tool staging systems. We have pioneered innovations in the displacement position sensors for over 30 years, and we work closely with applications requiring the highest precision and reliability. Our team of applications experts is ready and able to help you tackle your position metrology needs. - Lasers - Interferometers - Measurement electronics Click to learn more

igh-precision non-contact absolute position measurement on up to 64 synchronized channels ZPS SensorZYGO's ZPS™ system measures absolute position using ultra-compact optical sensors that are easily integrated into high-precision applications such as deformable mirrors and lens positioning. The optical sensor system provides up to 64 synchronized channels of high-precision, non-contact, absolute position measurement over a range of 1.2 mm. Measurement resolution is 0.01 nm with ≤ 1 nm/day measurement stability. The optical sensors do not generate heat and are insensitive to electromagnetic interference, making the ZPS system ideal for high-precision applications that may be affected by these factors. The ultra-compact sensors connect to the compact centralized enclosure via fiber optic cables. ZYGO's complimentary ZPS™ software provides a plug-and-play connection between the ZPS system and your computer, allowing you to get up and running with your system quickly and easily.

ZYGO is trusted worldwide to provide optical windows for the most high-precision, advanced applications. For over 45 years, we specialize in bringing the most challenging optical designs to life. ZYGO works as your design partner, ensuring you receive windows meeting your most stringent specifications. An optical window is a polished piece of material that is transparent at some portion of the electromagnetic spectrum, which allows the desired portion of the spectrum to pass into an optical instrument unaltered. The ZYGO Advantage ZYGO's optical windows are created using stringently controlled fabrication processes, allowing them to function reliably in a variety of extreme environments. ZYGO windows are found underwater, in deserts, at high altitudes and orbiting the earth. We customize every optical window to meet or exceed your requirements. Click to learn more

ZYGO creates precision optical mirrors using stringently-controlled fabrication processes, enabling them to function reliably in a variety of extreme environments. Our mirrors are found underwater, in deserts, at high altitudes and orbiting the earth. We customize every mirror to meet or exceed your requirements. Mirrors can also be light-weighted for applications where weight is critical, as is common in aerospace applications. Light-weighting is a process in which material is removed from an optical component by machining, or other methods, while still preserving the mirror's optical performance. Click to learn more

ZYGO's Optics business segment manufactures precision spheres and lenses ranging in diameter from 50 mm to 700 mm with radii from 12.7 mm to 8 meters. Our standard product line of transmission spheres is available in 100 and 150 mm clear apertures ranging in f-numbers from f/.65 to f/11 with wavefront errors of λ/10 or λ/20. Our new line of Ultrasphere™ transmission spheres is available at λ/40. Various convergers and divergers are also part of our standard product line. We are a qualified vendor for high laser fluence lenses. Click to learn more

ZYGO manufactures the world’s most accurate aspherical, spherical and freeform optics. These can be manufactured in sizes up to 600 mm, with surface figure tolerances better than 100 picometers. To put this into perspective, imagine an optic the size of the Unites States with a surface accuracy of less than a millimeter! Extreme precision powered surfaces: Many geometries in sizes up to 600mm: - On-axis and off-axis aspheric. - Freeform (non-rotationally symmetric) - Spherical - Axicon - Kinoform and other diffractive surfaces - Light-weighting and complex mechanical geometries available Click to learn more

Beamsplitter CubesZYGO specializes in providing large format, complex beamsplitters for use in aerospace, defense, and research applications. All beamsplitters are custom made per your design. Our interdisciplinary optics team will work closely with you to ensure manufacturability while still meeting stringent specifications. The ZYGO Advantage Engineering, fabrication, metrology, coating all under one roof Specializing in large beamsplitters, typically 4” to greater than 10” [100 mm to 250 mm] Ability to fabricate and coat a wide variety of materials Custom coating designs Technical Know-How Wedge matching of beamsplitter-compensator pairs to better than 1 arc second Well-established techniques for coating stress compensation Precision assembly, including optical contacting ZYGO Quality Decades of experience providing optics for space-based systems Click to learn more

Precision Straight EdgesStraight edges are precision machined and polished structures used as a physical or optical reference surface. ZYGO manufactures extreme precision straight edges from low CTE (coefficient of thermal expansion) materials, achieving tolerances up to 1,000 times better than a machinist’s straight edge. Fabrication, coating, and metrology are all performed by ZYGO. Ask us about high volume / OEM pricing options. Custom Shapes and Sizes Rectangular, square, L-shaped or other complex shapes Lengths from 6” to 40” [150 mm to 1 meter] Extreme Precision Flatness less than 1 μin [25 nm] Parallelism or perpendicularity to less than 2 arc seconds [.0005 degree] Optical Coatings Available For an optical reference, request a reflective coating based on your laser wavelength ZYGO’s in-house coating team can help you choose the right coating based on reflectance, environmental conditions, and durability requirements Click to learn more

Modern Defense, Aerospace and NewSpace customers require high performance optical systems which minimize Size, Weight and Power (SWaP) while maximizing optical performance. One proven technique for achieving demanding SWaP requirements is to require light-weighted optics. Light-weighting is a process by which material is removed from the optical component by machining or other methods while preserving the optical performance. This is often performed with low-expansion ceramics and glasses, and careful attention must be paid to the light-weighting structure to ensure optical performance and rigidity. ZYGO experts are available to assist in our partners design of these components for manufacturability.

ZYGO serves our Semiconductor, Industrial, and Research customers by providing non-traditional glass and low-expansion components and systems which fall outside of the traditional definition of “optics”. Examples include light-weighted wafer stages for semiconductor lithography, zero-expansion metrology reference frames for precision positioning control, and traditional straight-edge mirrors and references. We routinely manufacture these items in sizes up to 1.25 m with nanometer precision (when required!).