Description

The INFICON Pirani Standard Gauges, PSG500 and PSG502-S, PSG510-S and PSG512-S employ the most advanced digital Pirani technology available in the marketplace. The rugged stainless steel sensor cell and compact design qualifies them for use on semiconductor systems and for standard applications, such as fore vacuum lines. The PSG500 / PSG502-S Pirani Gauge series are direct replacements for TTR 91 S / TTR96 S series: Part-No Typ Part-No Typ 350-060 PSG500 DN 16 ISO-KF = 230 035 TTR 91 DN 16 ISO-KF 350-061 PSG500 1/8" NPT = 230 038 TTR 91 1/8" NPT 350-062 PSG500 DN 16 CF-R = 230 036 TTR 91 DN 16 CF-R 350-068 PSG500 DN 16 CF-R, long = 230 037 TTR 91 DN 16 CF-R, long 350-080 PSG500-S DN 16 ISO-KF = 230 040 TTR 91 S DN 16 ISO-KF 350-081 PSG500-S 1/8" NPT = 230 043 TTR 91 S 1/8" NPT 350-088 PSG500-S DN 16 CF-R, long = 230 042 TTR 91 S DN 16 CF-R, long 350-140 PSG502-S DN 16 ISO-KF = 230 045 TTR 96 S DN 16 ISO-KF 350-148 PSG502-S DN 16 CF-R, long = 230 047 TTR 96 S DN 16 CF-R,...

Product features

Measuring principle thermal conductance according to Pirani
1 x 10 -3 … 100 mbar ±15%
5 x 10 -4 … 1 x 10 -3 mbar ±50%
100 … 1000 mbar ±50%
1 x 10 -3 … 100 mbar 2%
Voltage range 0 … +10.3
Measurement range +1.9 … +10.0
Measurement range (air, 0 2, CO, N 2) 5 x 10 -4 to 1000
Number of setpoints none
At gauge +14 …+30
Ripple ≤1
Voltage vs. pressure logarithmic 1.286 Volts per decade
DN 16 ISO-KF, DN 16 CF-R, 7/16-20 UNF 1.5 (0.092)
DN 16 ISO-KF & DN 16 CF-R long tube 10 (0.61)
1/8'' NPT , 4 VCR, 8 VCR, 1/2'' tube 2 (0.122)
Operation +5 … +60
Vacuum connection (1) 80 / 250 (2)
Storage -20 … +65
DN 16 ISO-KF, 7/16-20 UNF 80
DN 16 CF-R, 4 VCR 100
1/8'' NPT, 1/2'' tube 70
8 VCR, DN 16 ISO-KF long tube 130
DN 16 CF-R long tube 140
Error signal 0 … +0.5 (filament rupture)
Output impedance 2 x 4.7
Minimum loaded impedance 10, short-circuit proof
Response time 80
Gauge identification 27.0, referenced to supply common
Adjustment one tactile switch for ATM and HV adjustment
Power consumption ≤1
Electrical connection FCC 68 / RJ45 appliance connector, 8 poles, male
Sensor cable 8 poles plus shielding
Cable length ≤100 (8 x 0.14 mm 2)
Materials exposed to vacuum glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435
Admissible pressure 10, limited to inert gases
Mounting orientation any
Degree of protection IP40

Additional product literature

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