Description

The INFICON Penning Gauge PEG100 provides reliable high vacuum measurements. The rugged penning cold cathode sensor has no filament to burn out. Due to titanium cathode plates and the reduced high voltage after plasma ignition, the gauge can be operated also in sputtering applications. The fieldbus options, in addition to the logarithmic analog output signal, allow easy integration into vacuum systems using Profibus DP or DeviceNet protocols. This Penning Gauge PEG100 series is direct replacement for Penning Transmitters of the PTR 225 / PTR 225 S / PTR 237 / PTR 225 PB / PTR 237 D series: Part-No Typ Part-No Typ 351-000 PEG100 DN 25 ISO-KF = 157 34 PTR 225 DN 25 KF 351-001 PEG100-S DN 25 ISO-KF, SP = 164 34 PTR225 S DN 25 KF, SP 351-002 PEG100 DN 40 CF-R = 157 36 PTR 237 DN 40 CF-R 351-005 PEG100-P DN 25 ISO-KF, PB = 896 41 PTR 225 PB DN 25 KF, PB 351-004 PEG100-D DN 40 CF-R, DevNet = 896 42 PTR 237 D DN 40 CF-R, DevNet 351-490 PEG100 Spare cathode plates (5 pcs) = 16291 PTR...

Product features

Measurement range 1 x 10 -9 to 1 x 10 -2
10 -8 to 10 -4 mbar ±30
Pressure, max. (absolute) 10
Operation (ambient) +10 to +50
Storage -20 to +75
Bakeout without electronics 350
Bakeout with electronics, at flange 70
Voltage 14.5 to 36
Output signal 0 to 10.6
Measurement range 0.66 to 10
Relation voltage / pressure 1.333
Connector FCC 68, female, 8 pin (shielded)
Cable length, max (analog) 100 (330)
Materials exposed to vacuum Stainless steel, CrNi, AI 2O 3, NiFe, Mo, Cu, Ni, Ti
Internal volume 21 (1.28)
Weight, approx. 500
Protection type IP40
Device type generic
Explicit peer to peer messaging no
I / O peer to peer messaging no
Configuration consistency value no
Faulted node recovery no
Baud rates 125 / 250 / 500
Master / Scanner no
I / 0 slave messaging yes
I / 0 slave messaging yes
I / 0 slave messaging yes
I / 0 slave messaging yes
Supply for DeviceNet™ 11 to 25
Connector for DeviceNet™ Phoenix Combicon, 5 pin
Supported baud rates (auto detection) 9.6 / 19.2 / 93.75 / 187.5 / 500 / 1500
Sync-Mode and Freeze-Mode Yes
Connector for Profibus D-sub, 9 pin

Additional product literature

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