HEBEI HAILAN BEARING MANUFACTURE CO.,LTD

IKO Cleanroom Precision Positioning Table TC···E is optimal for use in high cleanliness environments for semiconductor and LCD manufacturing machines. The unique highairtight structure seals the driving part and guiding parts of the slide table, and prevents dust generation around the table. IKO Cleanroom Precision Positioning Table TC···E achieves cleanliness class 3 by enhancing the airtightness inside the table.

The IKO Alignment Module AM is a positioning module developed for alignment stages by combining high rigidity Crossed Roller Bearings and Linear Way E with Precision Positioning Table TU. Alignment stages can be configured without adjusting the height of each alignment module, since the height tolerance is managed with high accuracy of ±10 μm.

Alignment Table AT is a rotary positioning mechanism capable of precise angle correction, in which a high rigidity steel table and bed are used and IKO Crossed Roller Bearings are incorporated in the bearings supporting the table. Alignment Table AT uses the ball screw drive to convert linear motion into circular motion in a fixed angle range and positions the table in the rotational direction. An IKO Linear Way L is used for the linear motion rolling guide of the ball screw drive mechanism, combined with a precision ball screw to achieve high precision positioning. Placing Alignment Table AT on the slide table of the IKO Precision Positioning Table enables the configuration of a low height XYθ multiaxis positioning mechanism. This enables the table to be used as an alignment table for precision measuring equipment, inspection equipment and assemblers.