Description

INFICON SKY CDG100D manometers are your best choice for accurate total pressure measurement and control. CDG100D gauges are temperature controlled at 100 °C for superior performance in demanding semiconductor and plasma processes. They are available for full scale ranges from 100 mTorr to 1000 Torr, with all common flange types and fieldbus interfaces and provide a linear 0 to 10 V, gas type independent, pressure signal. INFICON capacitance manometers use an ultra pure alumina ceramic diaphragm which is corrosion proof. The advantages of the ceramic sensor are better signal stability, faster recovery from atmosphere, short warm up time and an extraordinary lifetime. INFICON CDG are high quality, cost effective pressure sensors for demanding semiconductor, plasma and vacuum applications. with EtherCAT digital interface available now ! (1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours operation. (2)...

Product features

Accuracy (1) 0.2
on zero 0.0025
on span 0.02
Pressure, max. 400
Resolution 0.003
Lowest reading 0.01
Lowest suggested reading 0.05
Lowest suggested control pressure 0.5
Operation (ambient) (5) +10 … +50
Bakeout at flange ≤110
Storage –20 … +65
Supply voltage +14 … +30 VDC or ±15 V (±5%)
During Heat up ≤15
At operating temperature ≤10
Output signal (analog) 0 … +10
Response time (2) 30
Degree of protection IP 40
CE conformity EN 61000‑6‑2/-6-3, EN 61010 & RoHS
ETL certification UL 61010‑1, CSA 22.2 No.61010‑1
SEMI compliance (5) SEMI S2
Electrical connection D-sub, 15 pole, male
Number of setpoints 2 (SP1,SP2)
Relay contact ≤30
Protocol RS232-C
Read pressure, status, ID
Set set points, filter, zero adjust, factory reset, DC offset
Materials exposed to vacuum Aluminum oxide ceramic (AI 2O 3), stainless steel (AISI 316L (4))
I. volume 1/2'' tube 4.2 (0.26)
I. volume DN 16 ISO KF 4.2 (0.26)
I. volume DN 16 CF-R 4.2 (0.26)
I. volume 8 VCR® 4.2 (0.26)
Weight 1/2'' tube 837
Weight DN 16 ISO KF 852
Weight DN 16 CF-R 875
Weight 8 VCR® 897
Protocol EtherCAT protocol specialized for EtherCAT
Communication standards Vacuum Pressure Gauge"
Node address Explicit Device Identification
Physical layer 100BASE-Tx (IEEE 802.3)
Digital functions read pressure, status, ID
Digital functions set set points, filter, zero adjust, reset, DC offset
Process data Fixed PDO mapping and configurable PDO mapping
Mailbox (CoE) SDO requests, responses and information
EtherCAT connector RJ45, 8-pin (socket), IN and OUT
Cable shielded Ethernet CAT5e or higher
Cable length ≤100 (330)
Protocol DeviceNet™, group 2 slave only
Data rate 125, 250, 500 by switch or network programmable
Cable length 125 kbps 500 (1650)
Cable length 250 kbps 250 (825)
Cable length 500 kbps 100 (330)
MAC ID address 00 - 63 by switch or network programmable
Digital functions read pressure, status, ID
Digital functions set set points, filter, zero adjust, reset, DC offset
Specification DeviceNet™ "Vacuum Gauge Device Profile" (ODVA)
Device type ''VG'' vacuum gauge
I / O slave messaging polling only
Supply voltage for gauge at D-sub connector +14 … +30 VDC or ±15 V / ≤12 W
Supply voltage for DeviceNet transceiver at microstyle connector 24 V nom /
Connector for DeviceNet™ microstyle, 5 pin, male
Connector for CDG (analog output, supply voltage CDG, setpoints) D-sub, 15 pin, male
Baud rates 9.6 / 19.2 / 93.75 / 187.5 / 500
Address address 00 - 125 by switch or network programmable
Digital functions Read pressure, status, ID
Digital functions Set set points, filter, zero adjust, factory reset, DC offset
Connector for Profibus DP D-sub, 9 pin, female
Connector for CDG (analog output, supply voltage, setpoints) D-sub, 15 pin, male

Additional product literature

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