SONOSYS® offers solutions in the field of ultrasound and megasound cleaning for various applications. The focus here is on higher frequencies (between 400 kHz and 5 MHz) for cleaning the smallest particles and contaminants, right down to the nanometre range. The megasound products are developed entirely in-house, and range from the generator and transducer plates with patented piezo ceramics right up to immersible transducers and single and dual nozzles. The solutions satisfy the strictest quality and reliability requirements of the semiconductor, MEMS and LIGA technology sectors. The central focus here is always customer requirements and customer satisfaction. True to the company's motto, "Mastering nanoClean together", customer interests are analysed together to achieve the best cleaning results. In what has now been 25 years on the market, more than 4500 systems have consequently already been supplied, and numerous noteworthy customers in the semiconductor and MEMS industries worldwide have been served.

Company websites

  • Main site

Field of activity

Photos posted by this company

  • Face-To-Face Transducer Frequenz 400 kHz / 1 MHz
  • SONOSYS® Megasonic systems with slot nozzle / frequency 1 MHz
  • Diving transducer

Keywords associated with this company

  • Cleaning, industrial
  • Megasonic
  • Megasound
  • Wafer cleaning
  • Megasonic cleaning
  • Ultrasonic cleaning
  • Industrial sprayers – nebulisers
  • Nebulisers – atomisers
  • Wet bench process
  • Wet bench processes
  • Cleaning of microstructures
  • Nanoclean
  • Cleaning of nanoparticles
  • Semiconductor equipment
  • MEMS cleaning
  • Gentle cleaning
  • Ultra-fine cleaning
  • Ultrasonic
  • Microclean
  • LIGA technology
  • Cleaning of sensitive structures
  • Immersible transducers
  • Transducer plate
  • Single nozzle
  • Megasound wash basin
  • Damage-free cleaning
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Additional details


Key figures

  • 11 – 50
    Company headcount


  • Year established 1995
  • Site status Site status Registered office, Parent company
  • Main activity Main activity Manufacturer/ Producer

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4051 p v