ZYGO CORPORATION

Laser Interferometer AccessoriesZYGO offers a wide variety of accessories to expand or enhance the capabilities of your interferometer system. Transmission and reference flats and spheres, mounts, holders, and radius of curvature options provide the building blocks necessary for you to create optimum measurement setup to meet your metrology requirements, without the need for custom fabrication. Other accessories enhance the installation with options for vibration isolation, vertical orientation, and a beam-path switch to permit multiple simultaneous test setups. Optical Transmission Flats Transmission Spheres Reference Flats Reference Spheres Mechanical Mounts Mount accessories Output accessories Vertical workstations Radius of Curvature Guide rail (manual) Encoded ROC Interferometric ROC

Complex asphere metrology ideally suited for production-level volumes Advances in diamond turning and small-tool deterministic polishing have dramatically increased optical manufacturing capabilities to produce nearly any surface shape. Designers have leveraged these capabilities by increasingly designing aspheric optics into imaging, sensing and laser systems to improve performance and reduce size and weight of optical systems. However, it isn’t just the polishing equipment that is required to produce high quality aspheric optics – metrology is required to guide polishing and material removal from the surface to converge to an ideal surface figure that matches the design closely. A CGH (Computer Generated Hologram) is an optical null element that creates a unique wavefront enabling interferometric testing of complex optical surfaces including freeform, gullwing and off-axis aspheric shapes. Check our products: Zygo’s Verifire VTS and Verifire™ Asphere

Expanded apertures for large format optics metrology ZYGO's horizontal-axis beam expanders increase the native aperture size of a 4” interferometer to 12”, 18”, 24” or even 32” enabling the precision of interferometry in large format optical component and optical system qualification. Horizontal large aperture systems offer the unique capability to maintain two independent metrology channels; one of the native 4” interferometer aperture, and the other an expanded beam up to 32”, enabling the flexibility of two interferometers in one. When configured with the proper accessories the Large Aperture Systems can be used to measure both surface form and transmitted wavefront quality.

ZYGO's patented QPSI™ technology is truly a breakthrough in precision optical testing – it eliminates noise and ripple in phase data due to small vibrations, providing reliable data that would otherwise be noisy with traditional PSI acquisition. QPSI measurements require no special setup or calibration, and cycle times are typically equivalent to standard PSI measurements. QPSI is available exclusively from ZYGO and is included as standard equipment on Verifire, DynaFiz, Verifire HD, Verifire MST, and many infrared and large aperture interferometer systems. These systems are easy-to-use, on-axis, common-path Fizeau interferometers – the industry standard for reliable metrology – making them the logical choice for most optical surface form and transmitted wavefront measurements.

Watch: DynaPhase™ dynamic data acquisition Interferometric optical measurements in dynamic environments – from extreme vibration to real-time optical system alignment Fizeau Interferometry has become a trusted standard for precise metrology of optical components and systems. Traditionally, these instruments were required to be installed in lab environments, where conditions were carefully controlled, to ensure high precision measurements were not compromised. However, today a growing number of applications demand easy, cost-effective solutions for the use of interferometry in environments that were previously impossible to achieve quality metrology. DynaPhase® Dynamic Acquisition Technology LivePhase™ Real Time Data Feedback

ZYGO Long Life High Power LaserAt the heart of every laser interferometer instrument is a laser source that enables a host of capabilities and features. ZYGO's proprietary laser source is designed and manufactured in Middlefield, CT and exceeds the power and lifetime of commercially available HeNe lasers. With a lifetime rating exceeding 60,000 hours, our laser is backed by an unmatched 3-year warranty, minimizing downtime and maximizing your ROI. No other laser interferometer supplier can match the reliability and power, period. ZYGO’s patented QPSI vibration robust data acquisition, and DynaPhase vibration insensitive data acquisition, are both enabled by the ZYGO-made HeNe laser source. Vibration causes fringes to wash-out, resulting in bad data or a signal that is impossible to acquire. Shuttering the camera to a low duty cycle can freeze vibration on a frame-by-frame basis, however this reduces the amount of light available for a fringe signal.

ZYGO's Mx™ software powers complete system control & data analysis, including interactive 3D maps, quantitative phase data, intuitive navigation, & built-in SPC with statistics, control charting, and pass/fail limits. World Class Analysis & Control Software Mx is the successor to the highly trusted MetroPro measurement and analysis suite. Mx continues the legacy of trustworthy metrology, powerful customization, and production friendly automation. Its workflow-based design guides users through the metrology experience from setup through analysis and reporting. Interactive plots show full-area data in 2D or 3D, along with profile slices, Zernike analysis, slope analysis, and PSD views. Production quality analysis is made simple with built-in SPC, pass/fail indication, data reporting and run charts. Interactive Plots - Mx Metrology Software for Laser Interferometers

ZYGO’s Mx™ software is a complete data analysis suite for surface topography and wavefront data. With powerful tools and sleek visualizations, exploration and analysis of data is fast and easy. Key Features: - 2D and 3D Metrology - Matrix Processing at your Fingertips - Powerful Analysis Toolkits - Regions Segmentation - Simple Data Exchange Click to learn more

Whatever instrument you’re measuring with, Mx is there to automate repetitive tasks, remove unnecessary user interaction, and make your job easier. With a variety of automation tools, Mx is designed to simplify your workflow. Key Features: - Robust Measurement Optimization - GUI based Recipes - Powerful Scripting Language - Remote Access Click to learn more

ZYGO nano-position sensors are widely used in closed-loop motion control systems like photolithography and semiconductor inspection tool stages, as well as for deformable optical systems. We have pioneered innovations in the displacement and position sensors for over 30 years, and we work closely with applications requiring the highest precision and reliability. Our team of applications experts is ready and able to help you tackle your position metrology needs. Displacement Position Sensors ZYGO's ZMI™ systems use heterodyne interferometer technology to precisely measure relative changes in position. Absolute Position Sensors ZYGO'S ZPS™ system uses ultra-compact non-contact optical sensors to measure absolute position over a range of 1.2 mm on up to 64 synchronized channels.