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Beamsplitter CubesZYGO specializes in providing large format, complex beamsplitters for use in aerospace, defense, and research applications. All beamsplitters are custom made per your design. Our interdisciplinary optics team will work closely with you to ensure manufacturability while still meeting stringent specifications. The ZYGO Advantage Engineering, fabrication, metrology, coating all under one roof Specializing in large beamsplitters, typically 4” to greater than 10” [100 mm to 250 mm] Ability to fabricate and coat a wide variety of materials Custom coating designs Technical Know-How Wedge matching of beamsplitter-compensator pairs to better than 1 arc second Well-established techniques for coating stress compensation Precision assembly, including optical contacting ZYGO Quality Decades of experience providing optics for space-based systems Click to learn more

Complex Electro-Optical Systems, Helmet Mounted DisplayZYGO develops complete integrated systems and subsystems in a wide variety of applications incorporating a broad range of optical components such as a fiber optics, LCD or OLED displays, SLMs, gratings/diffractive elements, and LEDs. Example applications, including: Wide FOV mixed reality helmet mounted display for simulation and training Maskless Lithography illuminator and projection systems Custom Test equipment Calibrated distortion to better than 1ppm Interferometric and MTF lens test at temperature and pressure custom wavelength interferometry

Lasers continue to be employed in an ever widening application space. One of the most common challenges is getting the laser from the source to the object, with the right power, size and shape. We develop laser beam delivery systems that employ CW or pulsed pico-/femto- second lasers in the UV-to-IR across a wide range of applications including: Material Processing in semiconductor and other application with laser power exceeding 1000W CW Laser surgery Laser illumination for lithography and biotechnology beam expanders, shapers, and homogenizers

ZYGO serves our Semiconductor, Industrial, and Research customers by providing non-traditional glass and low-expansion components and systems which fall outside of the traditional definition of “optics”. Examples include light-weighted wafer stages for semiconductor lithography, zero-expansion metrology reference frames for precision positioning control, and traditional straight-edge mirrors and references. We routinely manufacture these items in sizes up to 1.25 m with nanometer precision (when required!).

One of the earliest applications of optics was magnifying the view of small object. To this day microscopic imaging systems are employed in a broad range of applications and our experience includes developing refractive and reflective designs in the wavelength range UV-VIS-SWIR with NA up to 3.3. We develop microscope objective and imaging systems in a number of applications including: fluorescence microscopes for biotechnology 3D dental imaging digital stereo 3D surgical zoom microscopes for ophthalmology and neurosurgery ellipsometry and solid immersion objectives for semiconductor inspection

Telescope Optical Assembly. We have developed products over a wide range of telescope designs including refractive, reflective and catadioptric, with apertures sizes from 75 mm to 500 mm, incorporating glass, ceramic and metal optical materials. Our primary focus is in the UV-VIS-SWIR wavelength range. Our product history includes: Rugged high performance ISR lenses for UAV and other airborne applications wide thermal range wide FOV and high resolution Interferometric and MTF testing at temperature and altitude tight tolerance systems that maintain high performance in challenging environments Space systems survival of launch loads across all relevant launch vehicles selection of low outgassing materials cost effective systems utilizing a commercial supply chain where applicable Earth imaging large and small aperture panchromatic, multi-spectral and hyperspectral high thermal stability and high thermal gradient tolerance freeform designs Click to learn more

ZYGO’s world class coating design engineers and technicians work closely with our metrology and optical manufacturing teams, creating a “one stop shopping” advantage for our customers. This simplifies your supply chain, reduces program risks and overall timeline. Select a single, vertically integrated manufacturer when it is critical your substrate will meet all requirements after a coating is applied. - Reflective Coatings - Anti-Reflective Coatings - Specialty Coatings The ZYGO Advantage Engineering, fabrication, metrology, coating all under one roof Large substrates up to 45” diameter [ 1145 mm] and 300 lbs. [136 kg] Deposition onto a wide variety of materia Click to learn more

Modern Defense, Aerospace and NewSpace customers require high performance optical systems which minimize Size, Weight and Power (SWaP) while maximizing optical performance. One proven technique for achieving demanding SWaP requirements is to require light-weighted optics. Light-weighting is a process by which material is removed from the optical component by machining or other methods while preserving the optical performance. This is often performed with low-expansion ceramics and glasses, and careful attention must be paid to the light-weighting structure to ensure optical performance and rigidity. ZYGO experts are available to assist in our partners design of these components for manufacturability.

Precision Straight EdgesStraight edges are precision machined and polished structures used as a physical or optical reference surface. ZYGO manufactures extreme precision straight edges from low CTE (coefficient of thermal expansion) materials, achieving tolerances up to 1,000 times better than a machinist’s straight edge. Fabrication, coating, and metrology are all performed by ZYGO. Ask us about high volume / OEM pricing options. Custom Shapes and Sizes Rectangular, square, L-shaped or other complex shapes Lengths from 6” to 40” [150 mm to 1 meter] Extreme Precision Flatness less than 1 μin [25 nm] Parallelism or perpendicularity to less than 2 arc seconds [.0005 degree] Optical Coatings Available For an optical reference, request a reflective coating based on your laser wavelength ZYGO’s in-house coating team can help you choose the right coating based on reflectance, environmental conditions, and durability requirements Click to learn more

ZYGO manufactures the world’s most accurate aspherical, spherical and freeform optics. These can be manufactured in sizes up to 600 mm, with surface figure tolerances better than 100 picometers. To put this into perspective, imagine an optic the size of the Unites States with a surface accuracy of less than a millimeter! Extreme precision powered surfaces: Many geometries in sizes up to 600mm: - On-axis and off-axis aspheric. - Freeform (non-rotationally symmetric) - Spherical - Axicon - Kinoform and other diffractive surfaces - Light-weighting and complex mechanical geometries available Click to learn more

ZYGO's Optics business segment manufactures precision spheres and lenses ranging in diameter from 50 mm to 700 mm with radii from 12.7 mm to 8 meters. Our standard product line of transmission spheres is available in 100 and 150 mm clear apertures ranging in f-numbers from f/.65 to f/11 with wavefront errors of λ/10 or λ/20. Our new line of Ultrasphere™ transmission spheres is available at λ/40. Various convergers and divergers are also part of our standard product line. We are a qualified vendor for high laser fluence lenses. Click to learn more

ZYGO creates precision optical mirrors using stringently-controlled fabrication processes, enabling them to function reliably in a variety of extreme environments. Our mirrors are found underwater, in deserts, at high altitudes and orbiting the earth. We customize every mirror to meet or exceed your requirements. Mirrors can also be light-weighted for applications where weight is critical, as is common in aerospace applications. Light-weighting is a process in which material is removed from an optical component by machining, or other methods, while still preserving the mirror's optical performance. Click to learn more

igh-precision non-contact absolute position measurement on up to 64 synchronized channels ZPS SensorZYGO's ZPS™ system measures absolute position using ultra-compact optical sensors that are easily integrated into high-precision applications such as deformable mirrors and lens positioning. The optical sensor system provides up to 64 synchronized channels of high-precision, non-contact, absolute position measurement over a range of 1.2 mm. Measurement resolution is 0.01 nm with ≤ 1 nm/day measurement stability. The optical sensors do not generate heat and are insensitive to electromagnetic interference, making the ZPS system ideal for high-precision applications that may be affected by these factors. The ultra-compact sensors connect to the compact centralized enclosure via fiber optic cables. ZYGO's complimentary ZPS™ software provides a plug-and-play connection between the ZPS system and your computer, allowing you to get up and running with your system quickly and easily.

ZYGO position sensors are widely used in closed-loop motion control systems, mainly for lithography and inspection tool staging systems. We have pioneered innovations in the displacement position sensors for over 30 years, and we work closely with applications requiring the highest precision and reliability. Our team of applications experts is ready and able to help you tackle your position metrology needs. - Lasers - Interferometers - Measurement electronics Click to learn more

ZYGO nano-position sensors are widely used in closed-loop motion control systems like photolithography and semiconductor inspection tool stages, as well as for deformable optical systems. We have pioneered innovations in the displacement and position sensors for over 30 years, and we work closely with applications requiring the highest precision and reliability. Our team of applications experts is ready and able to help you tackle your position metrology needs. Displacement Position Sensors ZYGO's ZMI™ systems use heterodyne interferometer technology to precisely measure relative changes in position. Absolute Position Sensors ZYGO'S ZPS™ system uses ultra-compact non-contact optical sensors to measure absolute position over a range of 1.2 mm on up to 64 synchronized channels.

Whatever instrument you’re measuring with, Mx is there to automate repetitive tasks, remove unnecessary user interaction, and make your job easier. With a variety of automation tools, Mx is designed to simplify your workflow. Key Features: - Robust Measurement Optimization - GUI based Recipes - Powerful Scripting Language - Remote Access Click to learn more

ZYGO’s Mx™ software is a complete data analysis suite for surface topography and wavefront data. With powerful tools and sleek visualizations, exploration and analysis of data is fast and easy. Key Features: - 2D and 3D Metrology - Matrix Processing at your Fingertips - Powerful Analysis Toolkits - Regions Segmentation - Simple Data Exchange Click to learn more

Watch: DynaPhase™ dynamic data acquisition Interferometric optical measurements in dynamic environments – from extreme vibration to real-time optical system alignment Fizeau Interferometry has become a trusted standard for precise metrology of optical components and systems. Traditionally, these instruments were required to be installed in lab environments, where conditions were carefully controlled, to ensure high precision measurements were not compromised. However, today a growing number of applications demand easy, cost-effective solutions for the use of interferometry in environments that were previously impossible to achieve quality metrology. DynaPhase® Dynamic Acquisition Technology LivePhase™ Real Time Data Feedback

ZYGO's patented QPSI™ technology is truly a breakthrough in precision optical testing – it eliminates noise and ripple in phase data due to small vibrations, providing reliable data that would otherwise be noisy with traditional PSI acquisition. QPSI measurements require no special setup or calibration, and cycle times are typically equivalent to standard PSI measurements. QPSI is available exclusively from ZYGO and is included as standard equipment on Verifire, DynaFiz, Verifire HD, Verifire MST, and many infrared and large aperture interferometer systems. These systems are easy-to-use, on-axis, common-path Fizeau interferometers – the industry standard for reliable metrology – making them the logical choice for most optical surface form and transmitted wavefront measurements.

Expanded apertures for large format optics metrology ZYGO's horizontal-axis beam expanders increase the native aperture size of a 4” interferometer to 12”, 18”, 24” or even 32” enabling the precision of interferometry in large format optical component and optical system qualification. Horizontal large aperture systems offer the unique capability to maintain two independent metrology channels; one of the native 4” interferometer aperture, and the other an expanded beam up to 32”, enabling the flexibility of two interferometers in one. When configured with the proper accessories the Large Aperture Systems can be used to measure both surface form and transmitted wavefront quality.

Complex asphere metrology ideally suited for production-level volumes Advances in diamond turning and small-tool deterministic polishing have dramatically increased optical manufacturing capabilities to produce nearly any surface shape. Designers have leveraged these capabilities by increasingly designing aspheric optics into imaging, sensing and laser systems to improve performance and reduce size and weight of optical systems. However, it isn’t just the polishing equipment that is required to produce high quality aspheric optics – metrology is required to guide polishing and material removal from the surface to converge to an ideal surface figure that matches the design closely. A CGH (Computer Generated Hologram) is an optical null element that creates a unique wavefront enabling interferometric testing of complex optical surfaces including freeform, gullwing and off-axis aspheric shapes. Check our products: Zygo’s Verifire VTS and Verifire™ Asphere

Laser Interferometer AccessoriesZYGO offers a wide variety of accessories to expand or enhance the capabilities of your interferometer system. Transmission and reference flats and spheres, mounts, holders, and radius of curvature options provide the building blocks necessary for you to create optimum measurement setup to meet your metrology requirements, without the need for custom fabrication. Other accessories enhance the installation with options for vibration isolation, vertical orientation, and a beam-path switch to permit multiple simultaneous test setups. Optical Transmission Flats Transmission Spheres Reference Flats Reference Spheres Mechanical Mounts Mount accessories Output accessories Vertical workstations Radius of Curvature Guide rail (manual) Encoded ROC Interferometric ROC

Interferometer workstations for efficient production optics manufacturing Verifire™ MST Laser Interferometer WorkstationZYGO’s Verifire VTS is a purpose-built spherical optics interferometer workstation. The vertical upward-looking workstation enables fast pick-and-place measurements by working with gravity to hold test parts in place. The integrated passive vibration isolation system and granite base ensure a rock-solid metrology platform designed for peak performance even in production environments. A motorized Z-stage with 1 m of travel enables quick automated placement of the test part, as well as point-to-point radius of curvature. VTS. The VTS is compatible with a range of interferometer mainframes, select the performance level that suits your production or development needs. The compact footprint is available with or without a safety enclosure with light-curtain motion interlock that meets CE machine safety requirements ... Click to read more

Large-Aperture Downward-Looking Interferometer Large aperture, small footprint – The Verifire XL is a turnkey interferometer workstation for easy testing of plano optics up to 300 mm diameter. This fully integrated system is easy to use, with a heavy duty tip/tilt stage that provides repeatable part placement without the need for custom fixturing. The compact footprint, with built-in vibration isolation and controller monitor stand, requires minimal production floor space.

At-wavelength metrology for demanding IR imaging applications Verifire Interferometer, Infrared WavelenghtsOptical imaging applications are broad and varied. Testing at a system's design wavelength is critical for development, final alignment and qualification. Night vision, IR, and thermal imaging systems for aerospace and defence, lithography subsystems, remote sensing telescopes, and exotic material qualification represent broadly-varying wavelength requirements, and all benefit from testing at design wavelength with an infrared interferometer system.

Performance, flexibility, and precise asphere metrology Aspheric optics enable significant benefits in the design and implementation of imaging, sensing and laser systems used in industries from defense & aerospace, semiconductor exposure and inspection systems and medical imaging systems. Production of aspheres that support these applications is dependent on precision metrology. After all, when it comes to aspheric optics, you can’t make what you can’t measure. The Verifire Asphere+ (VFA+) leverages the benefits of Fizeau interferometry to provide a unique combination of precise, high resolution, fast, and full aperture metrology for axisymmetric aspheres. The VFA+ provides a flexible metrology platform to measure a range of axisymmetric aspheres with only a change of the transmission sphere. The VFA+ is equipped with an optional secondary stage which supports a computer generated hologram (CGH) extending the asphere shape capability to nonsymmetri

Simultaneous Multi-Surface Test Interferometer Verifire™ MST Laser InterferometerSimplify the complex – multiple surfaces create complex fringe patterns, the Verifire™ MST uses patented wavelength-shifting technology to acquire phase data from multiple surfaces simultaneously. Report key metrics from individual surfaces of parallel windows, transmitted wavefront, as well as precise surface-to-surface information like total thickness variation (TTV), wedge and even material inhomogeneity. The Verifire™ MST addresses demanding applications like mobile device display glass, data storage disks and semiconductor wafers with precise surface and thickness variation metrology for test parts as thin as 0.5 mm.

ZYGO's Verifire HD and Verifire HDX are designed and built for mid-spatial frequency content characterization of extreme performance optical components and systems. QPSI, and the ZYGO-made long-life stabilized laser are included standard, along with best-in-class imaging and resolution for high instrument transfer function (ITF), superior characterization of mid-spatial frequency content and high-slope surface deviations. Key Features 5.3 megapixel (Verifire HD) and 11.6 megapixel (Verifire HDX) camera resolution, supported by rigorous optical designs and validated by ZYGO’s proprietary ITF qualification techniques. QPSI™ acquisition technology, available only from ZYGO, enables reliable measurements in vibration-prone environments ZYGO-manufactured HeNe laser source Longer lifetime than commercially available lasers, 60k hour lifetime backed by a 3-year warranty! Higher power for improved vibration performance and low-light applications ... Click to read more

Confident Metrology for a Dynamic World DynaFiz Dynamic Metrology Interferometer Purpose built for reliable interferometry in vibration-prone environments; versatile and flexible enough to address a wide range of application needs from high-end telescope testing to live phase feedback for active alignment of optical systems. The light efficient optical design of the DynaFiz®, combined with the ZYGO high power HeNe laser source, enables operation at high camera shutter speeds that "freeze" vibration. This dynamic capability provides reliable metrology in environments that are too violent for traditional temporal phase shifting techniques.